Semiconductor manufacturing apparatus, remote control system therefor, and remote operation device

Abstract

A remote control system for one or more semiconductor manufacturing apparatuses is provided with a supervisory device that control one or more of the semiconductor manufacturing apparatuses and a remote operation device that accesses the supervisory device through a communication line. Upon access, the supervisory device the remote carries performs the same operation as that carried out by the supervisory device on one or more of the semiconductor manufacturing apparatuses. The remote operation device replace operation parameter files of the supervisory device through remote control.

1 . A remote control system for one or more semiconductor manufacturing apparatuses comprising: 
 a supervisory device which controls said one or more semiconductor manufacturing apparatuses; and    a remote operation device that accesses said supervisory device through a communication line,    wherein upon accessing said supervisory device, said remote operation device displays a same screen as that displayed by said supervisory device, and enables said remote device to perform a same operation as that carried out by said supervisory device on said one or more semiconductor manufacturing apparatuses, and    wherein said remote operation device replaces operation parameter files of said supervisory device through remote control.    
   
   
       2 . The remote control system for one or more semiconductor manufacturing apparatuses according to  claim 1 , wherein said supervisory device performs user authentication when said remote operation device accesses said supervisory device.  
   
   
       3 . The remote control system for one or more semiconductor manufacturing apparatuses according to  claim 1 , wherein upon accessing said supervisory device, said remote operation device simultaneously displays the same screen as that displayed in the said supervisory device.  
   
   
       4 . The remote control for one or more semiconductor manufacturing apparatuses according to  claim 1 , wherein said supervisory device includes an IP routing function for achieving remote control operation from said remote operation device.  
   
   
       5 . A remote control system for one or more semiconductor manufacturing apparatuses comprising: 
 a host device operably connected to said one or more semiconductor manufacturing apparatuses; and    a remote operation device including a communication element that accesses said host device by way of a communication line;    wherein said host device is provided with an IP routing function for achieving remote control operation from said remote operation device, and a communication element having a call incoming function for receiving a call incoming from said communication line, and    said host device performs user authentication when said remote operation device connects to said host device,    wherein, upon authentication, said remote operation device simultaneously displays a same screen as that displayed on said host device, permitting said remote operation device to remotely control and operate said host device,    wherein said remote operation device replaces operation parameter files of said host device through remote control.    
   
   
       6 . The remote control system for one or more semiconductor manufacturing apparatuses according to  claim 5 , wherein said host device and said remote operation device each have a modem as said communication element for enabling connection between said host device and said remote operation device through one of an analog line and an analog network.  
   
   
       7 . The remote control system for one or more semiconductor manufacturing apparatuses according to  claim 5 , wherein said host device and said remote operation device each have a terminal adapter as said communication element for enabling connection between said host device and said remote operation device through one of an ISDN line and a network.  
   
   
       8 . The remote control system for one or more semiconductor manufacturing apparatuses according to  claim 5 , wherein said remote operation device enables same operations as those carried out by said host device.  
   
   
       9 . The remote control system for one or more semiconductor manufacturing apparatuses according to  claim 1 , further comprising a display screen associated with the supervisory device and a display screen associated with the remote operation device.  
   
   
       10 . The remote control system for one or more semiconductor manufacturing apparatuses according to  claim 5 , further comprising a display screen associated with the host device and a display screen associated with the remote operation device.