US2007199877A1PendingUtilityA1

Mems filter module

35
Individually held — no corporate assignee on recordPriority: Feb 24, 2004Filed: Mar 7, 2007Published: Aug 30, 2007
Est. expiryFeb 24, 2024(expired)· nominal 20-yr term from priority
Inventors:M. Steven RodgersJeffrey SniegowskiPaul Mcwhorter
B33Y 80/00B01D 71/00B01D 2313/10B01D 61/18B01D 63/088B01D 2313/14B01D 2313/08B01D 67/0062B01D 63/081B01D 2313/12
35
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Claims

Abstract

Various MEMS filter elements or modules are disclosed. One such MEMS filter module ( 34 ) includes a first film ( 70 ) and a second film ( 46 ) that are spaced and interconnected by a plurality of supports ( 78 ). A plurality of first flow ports ( 74 ) extend through the first film ( 70 ), and a plurality of second flow ports ( 50 ) extend through the second film ( 46 ). A plurality of annular filter walls ( 54 ) extend from the second film ( 46 ) toward the first film ( 70 ), and are separated therefrom by a filter trap gap ( 58 ). A filter trap chamber ( 62 ) is disposed on each side of each filter trap gap ( 58 ). Therefore, fluid will flow into one filter trap chamber ( 62 ), through a filter trap gap ( 58 ), and into another filter trap chamber ( 62 ), whether the flow is introduced into the filter module ( 34 ) through the first flow ports ( 74 ) or the second flow ports ( 50 ).

Claims

exact text as granted — not AI-modified
1 . A filter module, comprising: 
 a first film comprising a surface, a perimeter and a plurality of first flow ports;    a first annular seal extending around the perimeter of said first film and projecting above the surface of said first film; and    a filtering region bounded by said first annular seal, wherein all of said first flow ports are located in said filtering region.    
   
   
       2 . A filter module, as claimed in  claim 1 , wherein: 
 said first film has a maximum thickness of about 10 microns.    
   
   
       3 . A filter module, as claimed in  claim 1 , further comprising: 
 a chamber fluidly connected with at least one of said first flow ports.    
   
   
       4 . A filter module, as claimed in  claim 1 , further comprising: 
 a second annular seal extending around the perimeter of said first film and disposed in spaced relation to said first annular seal, wherein said second annular seal is disposed outwardly of said first annular seal.    
   
   
       5 . A filter module, as claimed in  claim 1 , further comprising: 
 a second film comprising a plurality of second flow ports, wherein said second film is spaced from said first film.    
   
   
       6 . A filter module, as claimed in  claim 5 , wherein: 
 said second film is connected to said first annular seal.    
   
   
       7 . A filter module, as claimed in  claim 1 , wherein: 
 said first film is connected to said first annular seal.    
   
   
       8 . A filter comprising the filter module of  claim 1  in a filter housing.  
   
   
       9 . A filter module, comprising: 
 a first film comprising a first perimeter and a plurality of first flow ports;    a second film comprising a second perimeter and a plurality of second flow ports, wherein said second film is spaced from said first film;    a first annular seal extending around the first and second perimeters of said first and second films, respectively; and    a filtering region bounded by said first annular seal, wherein all of said first flow ports and said second flow ports are located in said filtering region.    
   
   
       10 . A filter module, as claimed in  claim 9 , wherein: 
 at least one of said first film and said second film has a maximum thickness of about 10 microns.    
   
   
       11 . A filter module, as claimed in  claim 9 , further comprising: 
 a chamber fluidly connected with at least one of said first flow ports and with at least one of said second flow ports.    
   
   
       12 . A filter module, as claimed in  claim 9 , further comprising: 
 a second annular seal extending around the first and second perimeters of said first and second films, respectively, and disposed in spaced relation to said first annular seal, wherein said second annular seal is disposed outwardly of said first annular seal.    
   
   
       13 . A filter module, as claimed in  claim 9 , wherein: 
 said first flow ports and said second flow ports are of different sizes.    
   
   
       14 . A filter comprising the filter module of  claim 9  in a filter housing.  
   
   
       15 . A filter module, comprising: 
 a film comprising a perimeter and a plurality of flow ports;    a first annular seal extending around the perimeter of said film;    a filtering region bounded by said first annular seal, wherein all of said first flow ports are located in said filtering region; and    a support within the region bounded by said first annular seal for supporting said film in said filtering region.    
   
   
       16 . A filter module, as claimed in  claim 15 , wherein: 
 said film has a maximum thickness of about 10 microns.    
   
   
       17 . A filter module, as claimed in  claim 15 , further comprising: 
 a chamber fluidly connected with at least one of said flow ports.    
   
   
       18 . A filter module, as claimed in  claim 15 , further comprising: 
 a second annular seal extending around the perimeter of said film and disposed in spaced relation to said first annular seal, wherein said second annular seal is disposed outwardly of said first annular seal.    
   
   
       19 . A filter comprising the filter module of  claim 15  in a filter housing.  
   
   
       20 . A filter module, comprising: 
 a film comprising first and second opposed surfaces, a perimeter and at least one flow passage;    a first annular seal extending around the perimeter of said film;    a filtering region bounded by said first annular seal, wherein said at least one flow passage is located in said filtering region;    at least one first support within the region bounded by said first annular seal and in contact with the first surface of said film for supporting said film in said filtering region; and    at least one second support within the region bounded by said first annular seal and in contact with the second surface of said film for supporting said film in said filtering region.    
   
   
       21 . A filter module, as claimed in  claim 20 , wherein: 
 said film has a maximum thickness of about 10 microns.    
   
   
       22 . A filter module, as claimed in  claim 20 , further comprising: 
 a chamber fluidly connected with said at least one flow passage.    
   
   
       23 . A filter module, as claimed in  claim 20 , further comprising: 
 a second annular seal extending around the perimeter of said film and disposed in spaced relation to said first annular seal, wherein said second annular seal is disposed outwardly of said first annular seal.    
   
   
       24 . A filter comprising the filter module of  claim 20  in a filter housing.  
   
   
       25 . A filter module, comprising: 
 a film comprising a perimeter and at least one noncircular flow passage;    a first annular seal extending around the perimeter of said film; and    a filtering region bounded by said first annular seal, wherein said at least one noncircular flow passage is located in said filtering region.    
   
   
       26 . A filter module, as claimed in  claim 25 , wherein: 
 said film has a maximum thickness of about 10 microns.    
   
   
       27 . A filter module, as claimed in  claim 25 , further comprising: 
 a chamber fluidly connected with said at least one noncircular flow passage.    
   
   
       28 . A filter module, as claimed in  claim 25 , further comprising: 
 a second annular seal extending around the perimeter of said film and disposed in spaced relation to said first annular seal, wherein said second annular seal is disposed outwardly of said first annular seal.    
   
   
       29 . A filter module, as claimed in  claim 25 , wherein: 
 said at least one noncircular flow passage has an oblong shape.    
   
   
       30 . A filter module, as claimed in  claim 25 , wherein: 
 said at least one noncircular flow passage has a rectangular shape.    
   
   
       31 . A filter module, as claimed in  claim 25 , wherein: 
 said at least one noncircular flow passage has an annular shape.    
   
   
       32 . A filter module, as claimed in  claim 25 , wherein: 
 said at least one noncircular flow passage has an arcuate shape.    
   
   
       33 . A filter module, as claimed in  claim 25 , wherein: 
 said at least one noncircular flow passage has a triangular shape.    
   
   
       34 . A filter comprising the filter module of  claim 25  in a filter housing.

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