US2007187233A1PendingUtilityA1

Universal plating fixture

Assignee: IBMPriority: Feb 15, 2006Filed: Feb 15, 2006Published: Aug 16, 2007
Est. expiryFeb 15, 2026(expired)· nominal 20-yr term from priority
H05K 3/241C25D 17/06C25D 17/08H05K 3/0097H05K 2203/0165C25D 17/007
37
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Claims

Abstract

Disclosed are embodiments of a universal electroplating rack and method of using the rack. The universal electroplating rack comprises a main body adapted to accommodate and electrically connect to one or more customized inserts. Each customized insert is adapted to accommodate and electrically connect to a single workpiece. Additionally, both the main body and the customized insert(s) can comprise thief plates configured to improve plating uniformity across the plating surface area of the workpiece(s). Such a universal plating rack ensures a constant plating surface area regardless of workpiece size by varying the dimensions of the customized insert(s) so that universal processing parameters can be used for all workpieces. Consequently, for each new product developed, the universal electroplating racks of the invention will effectively reduce introduction costs, will avoid the need to qualify new electroplating process parameters (e.g., cycle time), and will effectively reduce lead time required.

Claims

exact text as granted — not AI-modified
1 . A rack for holding, during an electroplating process, a workpiece, said rack comprising: 
 a main body comprising a first aperture and a plurality of first conductors that protrude into said first aperture;    an insert comprising a second aperture and a plurality of second conductors that protrude into said second aperture,    wherein a first size and a first shape of said insert conform to said first aperture such that said insert fits within said first aperture and contacts said first conductors, and    wherein a second size and a second shape of said second aperture conform to said workpiece such that said workpiece fits within said second aperture and contacts said second conductors.    
   
   
       2 . The rack of  claim 1 , wherein combined surfaces of said main body, said insert and said workpiece on a first side of said rack provide a constant surface area to be electroplated.  
   
   
       3 . The rack of  claim 1 , wherein combined surfaces of said main body, said insert and said workpiece on a first side of said rack provide an approximately level surface area to be electroplated.  
   
   
       4 . The rack of  claim 1 , wherein said main body further comprises a first metal surface adjacent to said first aperture on a first side of said rack and said insert further comprises a second metal surface adjacent to said second aperture.  
   
   
       5 . A rack for holding, during an electroplating process, a plurality of workpieces, said rack comprising: 
 a main body comprising a plurality of first apertures and a plurality of first conductors that protrude into each of said first apertures; and    a plurality of inserts,    wherein said inserts each comprise a second aperture and a plurality of second conductors that protrude into said second aperture,    wherein said inserts each comprise a first size and a first shape that conform to said first apertures such that said inserts fit within said first apertures and contact said first conductors, and    wherein for each of said inserts, said second aperture comprises a second size and a second shape that conform to a corresponding one of said workpieces such that said corresponding one of said workpieces fits within said second aperture and contacts said second conductors.    
   
   
       6 . The rack of  claim 5 , wherein all of said first apertures are equal in size and shape such that all of said inserts have a same first size and a same first shape.  
   
   
       7 . The rack of  claim 5 , wherein combined surfaces of said main body, said inserts, and each of said workpieces on a first side of said rack provide a constant surface area to be electroplated.  
   
   
       8 . The rack of  claim 5 , wherein combined surfaces of said main body, said inserts, and each of said workpieces on a first side of said rack provide an approximately level surface area to be electroplated.  
   
   
       9 . The rack of  claim 5 , wherein said main body further comprises a first metal surface adjacent to said first apertures on a first side of said rack and each of said inserts further comprise a second metal surface adjacent to said second aperture.  
   
   
       10 . A method of electroplating a workpiece using a universal electroplating rack, said method comprising: 
 providing a main body of said universal electroplating rack such that said main body comprises a first aperture and a plurality of first conductors that protrude into said first aperture; and    customizing an insert for said universal electroplating rack such that said insert is formed with the following:    a first size and a first shape that conform to said first aperture so that said insert can fit within said first aperture and contact said first conductors,    a second aperture having second size and a second shape, and    a plurality of second conductors that protrude into said second aperture, wherein said second size and said second shape conform to said workpiece so that said workpiece can fit within said second aperture and contact said second conductors.    
   
   
       11 . The method of  claim 10 , wherein said customizing further comprises customizing said insert such that when said workpiece is inserted into said insert and said insert is inserted into said main body, combined surfaces of said main body, said insert and said workpiece on a first side of said universal electroplating rack provide a constant surface area to be electroplated.  
   
   
       12 . The method of  claim 10 , wherein said customizing further comprises customizing said insert such that when said workpiece is inserted into said insert and said insert is inserted into said main body, combined surfaces of said main body, said insert and said workpiece on a first side of said universal electroplating rack provide an approximately level surface area to be electroplated.  
   
   
       13 . The method of  claim 10 , wherein said main body is further provided with a first metal surface adjacent to said first aperture on a first side of said universal electroplating rack and wherein said customizing further comprises forming said insert with a second metal surface adjacent to said second aperture.  
   
   
       14 . The method of  claim 10 , further comprising electroplating said workpiece by applying universal plating parameters.  
   
   
       15 . A method of electroplating a plurality of workpieces using a universal electroplating rack, said method comprising: 
 providing a main body of said universal electroplating rack such that said main body comprises a plurality of first apertures and a plurality of first conductors that protrude into said first apertures; and    customizing a plurality of inserts for said universal electroplating rack such that each of said inserts is formed with the following:    a first size and a first shape that conforms to at least one of said first apertures such that said inserts can fit within said first apertures and contact said first conductors,    a second aperture that has a second size and a second shape, and    a plurality of second conductors that protrude into said second aperture, wherein said second size and said second shape conform to a corresponding one of said workpieces so that said corresponding one of said workpieces can fit within said second aperture and contact said second conductors.    
   
   
       16 . The method of  claim 15 , wherein all of said first apertures are formed equal in size and shape.  
   
   
       17 . The method of  claim 15 , wherein said customizing further comprises customizing said inserts such that when said workpieces are inserted into said inserts and said inserts are inserted into said main body, combined surfaces of said main body, said inserts and said workpieces on a first side of said universal electroplating rack provide a constant surface area to be electroplated.  
   
   
       18 . The method of  claim 15 , wherein said customizing further comprises customizing said inserts such that when said workpieces are inserted into said inserts and said inserts are inserted into said main body, combined surfaces of said main body, said inserts and each of said workpieces on a first side of said universal electroplating rack provide an approximately level surface area to be electroplated.  
   
   
       19 . The method of  claim 15 , wherein said main body is further provided with a first metal surface adjacent to said first apertures on a first side of said universal electroplating rack and wherein said customizing further comprises forming each of said inserts with a second metal surface adjacent to said second aperture.  
   
   
       20 . The method of  claim 15 , further comprising simultaneously electroplating said workpieces by applying universal plating parameters.

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