Fluorine-containing ethylenic monomer having hydroxyl group or fluoroalkyl carbonyl group and fluorine-containing polymer prepared by polymerization of same

Abstract

There are provided a fluorine-containing ethylenic monomer having hydroxyl group or fluoroalkyl carbonyl group and represented by the formula (1): and the formula (14): respectively, wherein X 1 and X 2 are the same or different and each is H or F; X 3 is H, F, Cl or CF 3 ; Rf 1 and Rf 2 are the same or different and each is a perfluoroalkyl group having 1 to 20 carbon atoms; Rf 3 is a fluorine-containing alkylene group having 1 to 40 carbon atoms or a fluorine-containing alkylene group having ether bond which has 1 to 100 carbon atoms and the sum of carbon atom and oxygen atom of two or more; a is 0 or 1, a fluorine-containing polymer having a structural unit of the above-mentioned monomer and a composition for a photoresist. The monomer has good polymerizability, particularly radical polymerizability, and the polymer obtained by polymerizing the monomer has excellent optical characteristics and is useful as a base polymer for an antireflection film and for a composition for a resist.

1 - 10 . (canceled)  
   
   
       11 . A fluorine-containing ethylenic monomer having fluoroalkyl carbonyl group represented by the formula (21):  
     
       
         
         
             
             
         
       
     
     wherein Rf 1  is a perfluoroalkyl group having 1 to 20 carbon atoms; Rf 9  is a fluorine-containing alkylene group having 1 to 39 carbon atoms or a fluorine-containing alkylene group having ether bond which has 1 to 99 carbon atoms; a is 0 or 1.  
   
   
       12 . (canceled)  
   
   
       13 . A fluorine-containing ethylenic monomer having fluoroalkyl carbonyl group represented by the formula (24):  
     
       
         
         
             
             
         
       
     
     wherein Rf 1  is a perfluoroalkyl group having 1 to 20 carbon atoms; b is an integer of from 1 to 13.  
   
   
       14 . A fluorine-containing ethylenic monomer having fluoroalkyl carbonyl group represented by the formula (25):  
     
       
         
         
             
             
         
       
     
     wherein Rf 1  is a perfluoroalkyl group having 1 to 20 carbon atoms; c is an integer of from 1 to 13; d is an integer of from 1 to 5.  
   
   
       15 - 25 . (canceled)