Actuation device and method for high density hard disk drive head

Abstract

A disk drive apparatus. The apparatus has a first drive device and a support member coupled to the first drive device. The support member has a tongue portion and a gimbal portion. The tongue portion is coupled the gimbal portion. A fixed drive device is formed within a first portion of the tongue portion. A movable drive device is operably coupled to the fixed drive device and formed within a second portion of the tongue portion. A read/write head is coupled to the movable drive device. A voltage source is coupled between the fixed drive device and the movable drive device to cause movement of the read/write head by forming an interaction between the fixed drive device and the movable drive device.

1 . A disk drive apparatus, the apparatus comprising: 
 a first drive device;    a support member coupled to the first drive device, the support member having a tongue portion and a gimble portion, the tongue portion being coupled the gimbal portion;    a fixed drive device formed within a first portion of the tongue portion;    a movable drive device operably coupled to the fixed drive device and formed within a second portion of the tongue portion;    a read/write head coupled to the movable drive device;    a voltage source coupled between the fixed drive device and the movable drive device to cause movement of the read/write head by forming an interaction between the fixed drive device and the movable drive device.    
   
   
       2 . The apparatus of  claim 1  wherein the interaction is an electrostatic actuation force.  
   
   
       3 . The apparatus of  claim 1  wherein the movable drive device comprises a first comb drive coupled to a second comb drive of the fixed drive device to cause the movement of the read/write head in an annular manner about a fixed axis, the fixed axis being within a center region of the movable drive device; wherein the fixed drive device has a same thickness as a thickness of the tongue portion.  
   
   
       4 . The apparatus of  claim 1  wherein the fixed drive device and the movable drive device being formed from the support member as a continuous structure.  
   
   
       5 . The apparatus of  claim 1  wherein the movable drive device being coupled to the fixed drive device within the tongue portion through a plurality of hinge members.  
   
   
       6 . The apparatus of  claim 1  wherein the movement is a linear movement of the read/write head.  
   
   
       7 . The apparatus of  claim 1  wherein the tongue portion is stainless steel.  
   
   
       8 . The apparatus of  claim 1  wherein the movement has a spatial distance of less than one micron.  
   
   
       9 . The apparatus of  claim 1  wherein the interaction is an electrostatic force caused between the fixed drive device and the movable drive device using the voltage source.  
   
   
       10 . The apparatus of  claim 9  wherein the electrostatic force causes movement of the movable drive device.  
   
   
       11 . A method for fabricating an integrated actuating device for a read/write head, the method comprising: 
 providing a substrate, the substrate having an upper surface;    forming a plurality of trench isolation regions within the substrate to define a plurality of external drive regions;    forming a plurality of movable drive members and a plurality of fixed drive members on the substrate, the movable drive members being operably coupled to the fixed drive members, the movable drive members being formed around a center region, the center region being an axis of the movable drive members; and    attaching a read/write head on the center portion of the plurality of movable drive members.    
   
   
       12 . The method of  claim 11  wherein the forming of the plurality of isolation regions including an etching process and a filling process.  
   
   
       13 . The method of  claim 11  wherein the attaching is a bonding process to bond the read/write head onto the center portion of the substrate.  
   
   
       14 . The method of  claim 11  further comprising forming a spacer layer overlying the center region and then attaching the read/write head onto the center region.  
   
   
       15 . The method of  claim 11  further comprising forming a conductive layer overlying the plurality of fixed drive member and the movable drive members.  
   
   
       16 . The method of  claim 15  wherein the conductive layer reduces a gap spacing between a portion of the fixed drive member and a portion of the movable drive members.