Gas dispersion shield and method

Abstract

A gas dispersion shield and method for protecting the bottom surface of a gas deposition chamber, while injecting gas from a gas insertion channel into the chamber at a non-vertical angle. The gas dispersion shield includes a cylindrically shaped vertical sidewall, an annular flange extending horizontally and outwardly from the sidewall upper end, and a horizontal wall that extends inwardly from the sidewall lower end. The flange includes a top surface, a bottom surface, and a plurality of holes formed through the flange each extending in a non-vertical direction from the bottom surface to the top surface. The bottom surface includes an annular protrusion that fits at least partially into the gas insertion channel, to ensure the gas flows through the non-vertical holes instead of escaping around the flange.

1 . A gas dispersion shield, comprising: 
 a cylindrically shaped vertical sidewall having upper and lower ends; and    an annular flange extending horizontally and outwardly from the sidewall upper end, the flange comprising: 
 a top surface,  
 a bottom surface, and  
 a plurality of holes formed through the flange each extending in a non-vertical direction from the bottom surface to the top surface.  
   
   
   
       2 . The gas dispersion shield of  claim 1 , further comprising: 
 a horizontal wall that extends inwardly from the sidewall lower end.    
   
   
       3 . The gas dispersion shield of  claim 2 , wherein an aperture is formed in the horizontal wall.  
   
   
       4 . The gas dispersion shield of  claim 1 , wherein the flange bottom surface includes a downwardly extending annular protrusion.  
   
   
       5 . The gas dispersion shield of  claim 4 , wherein the plurality of holes extend through the downwardly extending annular protrusion.  
   
   
       6 . The gas dispersion shield of  claim 1 , wherein the holes extend in a direction between 25 and 65 degrees relative to the vertical sidewall.  
   
   
       7 . The gas dispersion shield of  claim 1 , wherein the holes extend in a direction generally about 30 degrees relative to the vertical sidewall.  
   
   
       8 . The gas dispersion shield of  claim 1 , wherein each of the holes extends upwardly and toward a center axis of the cylindrically shaped vertical side wall.  
   
   
       9 . A method of protecting a stepped shaped bottom surface of a gas deposition chamber having an annular shaped gas insertion channel, the method comprising: 
 placing a gas dispersion shield on a stepped shaped bottom surface of a gas deposition chamber, wherein the gas dispersion shield includes a cylindrically shaped vertical sidewall having upper and lower ends, and an annular flange extending horizontally and outwardly from the sidewall upper end and having top and bottom flange surfaces and a plurality of holes formed therein extending in a non-vertical direction from the bottom flange surface to the top flange surface, with openings of the holes in the bottom flange surface being disposed over a gas insertion channel of the gas deposition chamber bottom surface;    injecting a gas into the gas insertion channel such that the gas flows through the plurality of holes and is injected into the gas deposition chamber in a non-vertical direction; and    removing the gas dispersion shield from the gas deposition chamber bottom surface.    
   
   
       10 . The method of  claim 9 , wherein the placing of the gas dispersion shield includes forming a friction fit between the vertical sidewall and the gas deposition chamber bottom surface.  
   
   
       11 . The method of  claim 9 , wherein the gas dispersion shield further comprises a horizontal wall that extends inwardly from the sidewall lower end and is disposed over the gas deposition chamber bottom surface after the placing of the gas dispersion shield.  
   
   
       12 . The method of  claim 11 , wherein the horizontal wall includes an aperture formed therein.  
   
   
       13 . The method of  claim 9 , wherein the flange bottom surface includes a downwardly extending annular protrusion, and wherein the placing of the gas dispersion shield further comprises at least partially inserting the downwardly extending annular protrusion into the gas insertion channel.  
   
   
       14 . The method of  claim 13 , wherein the plurality of holes extend through the downwardly extending annular protrusion.  
   
   
       15 . The method of  claim 9 , wherein the holes extend in a direction between 25 and 65 degrees relative to the vertical sidewall.  
   
   
       16 . The method of  claim 9 , wherein the holes extend in a direction generally about 30 degrees relative to the vertical sidewall.  
   
   
       17 . The method of  claim 9 , wherein each of the holes extends upwardly and toward a center axis of the cylindrically shaped vertical side wall.