Replaceable Parylene Membranes For Nanocalorimeter

Abstract

A measurement operation, such as a calorimetry measurement, is performed using a measurement array and a replaceable passivation membrane (e.g., a parylene membrane). The passivation membrane is used to cover the measurement array to provide temporary electrical and chemical passivation, while still allowing measurement of the parameter of interest (e.g., temperature, in a calorimetry measurement). By only replacing the membrane instead of the entire measurement array between measurement operations, the cost of the measurements can be significantly reduced over conventional methods. The passivation membrane can be mounted on a frame to simplify handling of the membrane.

1 . A method for creating membrane assembly, the membrane assembly comprising a membrane of a first material supported by a rigid frame, the method comprising: 
 attaching a backing structure to the frame, the backing structure comprising a planar region enclosed by the frame;    forming a continuous layer of the first material over the planar region and a portion of the frame surrounding the planar region; and    releasing the backing structure from the frame and the continuous layer of the first material to form the membrane.    
   
   
       2 . The method of  claim 1 , wherein the planar region comprises a low-adhesion film, and 
 wherein releasing the backing structure comprises separating the continuous layer of the first material from the low-adhesion film.    
   
   
       3 . The method of  claim 2 , wherein the low-adhesion film comprises one of a non-stick surface, a thermal-release tape, an ultra-violet release tape, and a sacrificial layer.  
   
   
       4 . The method of  claim 1 , wherein the first material comprises parylene, and wherein forming the continuous layer of the first material comprises vapor depositing parylene over the planar region and the portion of the frame surrounding the planar region.