Pulse tube cryogenic cooler

Abstract

A pulse tube cryogenic cooler includes a pressure vibration generating device configured to generate pressure vibration in operation gas; a regenerator connected to the pressure vibration generating device; a pulse tube connected to the regenerator; and a phase control mechanism connected to the pulse tube; wherein a heat exchanger is provided at a part where the regenerator and the pulse tube are connected.

1 . A pulse tube cryogenic cooler, comprising: 
 a pressure vibration generating device configured to generate pressure vibration in operation gas;    a regenerator connected to the pressure vibration generating device;    a pulse tube connected to the regenerator; and    a phase control mechanism connected to the pulse tube;    wherein a heat exchanger is provided at a part where the regenerator and the pulse tube are connected.    
   
   
       2 . The pulse tube cryogenic cooler as claimed in  claim 1 , 
 wherein the heat exchanger includes:    a regenerator connection part where the regenerator is connected;    a pulse tube connection part where the pulse tube is connected; and    a stage member where a plurality of flow paths are formed so as to connect the regenerator connection part and the pulse tube connection part and thereby the operation gas flows between the regenerator connection part and the pulse tube connection part.    
   
   
       3 . The pulse tube cryogenic cooler as claimed in  claim 2 , 
 wherein the flow paths are slits.    
   
   
       4 . The pulse tube cryogenic cooler as claimed in  claim 3 , 
 wherein a lid part configured to cover and seal the stage member is provided; and    the regenerator connection part and the pulse tube connection part are provided at the lid part so as to face the slits.    
   
   
       5 . The pulse tube cryogenic cooler as claimed in  claim 3 , 
 wherein the slits are formed in a body with the stage member.    
   
   
       6 . The pulse tube cryogenic cooler as claimed in  claim 4 , 
 wherein the slits are formed in a body with the stage member.    
   
   
       7 . A superconducting apparatus, comprising: 
 the pulse tube cryogenic cooler as set forth in  claim 1 .    
   
   
       8 . A cryopump, comprising: 
 the pulse tube cryogenic cooler as set forth in  claim 1 .    
   
   
       9 . A cryogenic measuring and analyzing apparatus, comprising: 
 the pulse tube cryogenic cooler as set forth in  claim 1 .    
   
   
       10 . A nuclear magnetic resonance apparatus comprising: 
 the pulse tube cryogenic cooler as set forth in  claim 1.