Method of etching semiconductor device

Abstract

In a method of etching a semiconductor device or a liquid crystal device, an etching liquid is prepared to include a solvent, and a solute containing at least iodine, at least one iodine compound and alcohol. The etching liquid is applied to a substrate of the semiconductor device or the liquid crystal device having plural gold columns on a gold layer or gold alloy columns on a gold alloy layer.

1 . A method of etching a semiconductor device or a liquid crystal device, comprising: 
 preparing an etching liquid including a solvent, and a solute containing at least iodine, at least one iodine compound and alcohol, and    applying said etching liquid to a substrate of the semiconductor device or the liquid crystal device having plural gold columns on a gold layer or gold alloy columns on a gold alloy layer.    
   
   
       2 . A method as claimed in  claim 1 , wherein said alcohol is primary alcohol.  
   
   
       3 . A method as claimed in  claim 2 , wherein said alcohol is primary alcohol and has a number of carbon atoms of at least 2.  
   
   
       4 . A method as claimed in  claim 1 , wherein said iodine is contained in an amount of 0.5 to 10% by weight.  
   
   
       5 . A method as claimed in  claim 1 , wherein said columns have a square shape, and a height H of the columns perpendicular to the substrate to a least distance d between adjacent columns (H/d) is more than 1.  
   
   
       6 . A method as claimed in  claim 5 , wherein the least distance d between the adjacent columns is 10 μm or less.  
   
   
       7 . A method as claimed in  claim 6 , wherein said etching liquid has a surface tension of 45 mN/m or lower.  
   
   
       8 . A method as claimed in  claim 1 , wherein said etching liquid further includes a surfactant.  
   
   
       9 . A method as claimed in  claim 8 , wherein the surfactant has a main chain and at least one side chain, said main chain having at least one member selected from the group consisting of at least one nitrogen atom and at least one oxygen atom, and said side chain having at least one hydroxyl group of an alcohol