Cleaning method used in removing contaminants from the surface of an oxide or fluoride comprising a group III B metal

Abstract

Disclosed herein is a cleaning method useful in removing contaminants from a surface of a coating which comprises an oxide or fluoride of a Group III B metal. Typically the coating overlies an aluminum substrate which is present as part of a semiconductor processing apparatus. The coating typically comprises an oxide or a fluoride of Y, Sc, La, Ce, Eu, Dy, or the like, or yttrium-aluminum-garnet (YAG). The coating may further comprise about 20 volume % or less of Al 2 O 3 .

1 - 40 . (canceled)  
   
   
       41 . A method of cleaning a surface of a plasma-resistant coating which has been applied to an aluminum substrate or an aluminum alloy substrate, wherein said method comprises: 
 a) saturating said coating with an inert solvent which does not harm the aluminum alloy upon contact, wherein said saturation is carried out in an ultrasonic bath; followed by    b) applying to said coating a chemically active solvent, whereby contaminants are removed from said coating    
   
   
       42 . A method in accordance with  claim 41 , wherein said coating comprises a material selected from the group consisting of: yttrium-aluminum-garnet (YAG); an oxide of an element selected from the group consisting of Y, Sc, La, Ce, Eu, and Dy; a fluoride of an element selected from the group consisting of Y, Sc, La, Ce, Eu, and Dy; and combinations thereof.  
   
   
       43 . A method in accordance with  claim 42 , wherein said coating is applied to said substrate surface using a technique selected from the group consisting of thermal/flame spraying, plasma spraying, sputtering, and chemical vapor deposition (CVD).  
   
   
       44 . A method in accordance with  claim 41 , wherein said inert solvent is deionized water.  
   
   
       45 . A method in accordance with step a) of  claim 41 , wherein said coated substrate is placed in a deionized water ultrasonic bath for a period of about 5 minutes to about 30 minutes.  
   
   
       46 . A method in accordance with  claim 45 , wherein said chemically active solvent is a dilute acid solution.  
   
   
       47 . A method in accordance with  claim 46 , wherein said dilute acid solution includes HF and HNO 3 .  
   
   
       48 . A method in accordance with  claim 47 , wherein said dilute acid solution comprises about 0.1 to about 5 volume % HF, about 1 to about 15 volume % HNO 3 , and about 80 to about 99 volume % deionized water.  
   
   
       49 . A method of removing contaminants from an article comprising an aluminum substrate or an aluminum alloy substrate with a protective coating material overlying said substrate, where said protective coating material is selected from the group consisting of: yttrium-aluminum-garnet (YAG); an oxide of an element selected from the group consisting of Y, Sc, La, Ce, Eu, and Dy; a fluoride of an element selected from the group consisting of Y, Sc, La, Ce, Eu, and Dy; and combinations thereof, wherein said protective coating material is saturated with a solvent which is an inert solvent with respect to said protective coating material and which does not harm said aluminum or alloy substrate, and wherein said protective coating material is subsequently treated with a solvent which is chemically reactive with said protective coating material, whereby contaminants are removed from said protective coating material without harming said aluminum or aluminum alloy.  
   
   
       50 . A method in accordance with  claim 49 , wherein said protective coating material is used in combination with a distinguishable layer of anodized aluminum or other aluminum oxide coating layer.  
   
   
       51 . A method in accordance with  claim 49  or  claim 50 , wherein said inert solvent is deionized water.  
   
   
       52 . A method in accordance with  claim 49  or  claim 50 , wherein saturating of said protective coating material with said inert solvent is carried out using deionized water in an ultrasonic bath for a time period ranging from about 5 minutes to about 30 minutes.  
   
   
       53 . A method in accordance with  claim 52 , wherein said ultrasonic bath is operated at a frequency of about 40 kHz.  
   
   
       54 . A method in accordance with  claim 49  or  claim 50 , wherein said chemically active solvent is a dilute acid solution.  
   
   
       55 . A method in accordance with  claim 54 , wherein said dilute acid solution includes HF and HNO 3 .  
   
   
       56 . A method in accordance with  claim 55 , wherein said dilute acid solution comprises about 0.1 to about 5 volume % HF, about 1 to about 15 volume % HNO 3  and about 80 to about 90 volume % deionized water.  
   
   
       57 . A method in accordance with  claim 49  or  claim 50 , wherein, subsequent to treatment of said protective coating material with said dilute acid solution, said article is placed in deionized water in an ultrasonic bath for a time period ranging from about 30 minutes to about 2 hours, whereby residue of said dilute acid solution is removed from said article.  
   
   
       58 . A method in accordance with  claim 57 , wherein said time period ranges from about 40 minutes to about 1 hour.