Method of inhibiting metal corrosion

Abstract

A method of inhibiting metal corrosion is applicable to a metal-containing substrate, which has a surface in contact with a reaction solution. The method includes the steps of mixing ozone with the reaction solution and forming a metal oxide protective layer on the surface of the metal-containing substrate, so as to prevent metal beneath the protective layer from being continuously oxidized and corroded. In the method, the reaction solution contacting with metal is further adjusted in its oxidation-reduction property and pH value to change the corrosivity of the reaction solution and mitigate the corrosion tendency of metal.

1 . A method of inhibiting metal corrosion, said method being applicable to a metal-containing substrate that has a surface in contact with a reaction solution; said method comprising the steps of: 
 mixing ozone with the reaction solution; and    forming a passive metal oxide layer on the surface of the metal-containing substrate.    
   
   
       2 . The method of inhibiting metal corrosion as claimed in  claim 1 , wherein a concentration of the ozone in the reaction solution is preferably within the range from 0.1 to 30 ppm.  
   
   
       3 . The method of inhibiting metal corrosion as claimed in  claim 1 , wherein the ozone is dissolved in a solution before being added into the reaction solution.  
   
   
       4 . The method of inhibiting metal corrosion as claimed in  claim 3 , wherein the solution includes an additive.  
   
   
       5 . The method of inhibiting metal corrosion as claimed in  claim 4 , wherein the additive includes an inorganic acid or any salt thereof, or any combinations of the inorganic acid and any salt thereof.  
   
   
       6 . The method of inhibiting metal corrosion as claimed in  claim 5 , wherein the inorganic acid is selected from the group consisting of carbonic acid, phosphoric acid, nitric acid, boric acid, and silicic acid.  
   
   
       7 . The method of inhibiting metal corrosion as claimed in  claim 5 , wherein the additive in the reaction solution has a concentration preferably within the range from 10 −5  to 10 −1 M.  
   
   
       8 . The method of inhibiting metal corrosion as claimed in  claim 1 , wherein the ozone is in gas state and directly dissolved in the reaction solution.  
   
   
       9 . The method of inhibiting metal corrosion as claimed in  claim 1 , further comprising the step of mixing an additive with the reaction solution.  
   
   
       10 . The method of inhibiting metal corrosion as claimed in  claim 9 , wherein the additive includes an inorganic acid or any salt thereof, or any combinations of the inorganic acid and any salt thereof.  
   
   
       11 . The method of inhibiting metal corrosion as claimed in  claim 10 , wherein the inorganic acid is selected from the group consisting of carbonic acid, phosphoric acid, nitric acid, boric acid, and silicic acid.  
   
   
       12 . The method of inhibiting metal corrosion as claimed in  claim 10 , wherein the additive in the reaction solution has a concentration preferably within the range from 10 5  to 10 −1 M.  
   
   
       13 . The method of inhibiting metal corrosion as claimed in  claim 1 , wherein the reaction solution is selected from the group consisting of ultrapure water, deionized water, and water solution containing acid/alkali agent.  
   
   
       14 . The method of inhibiting metal corrosion as claimed in  claim 1 , wherein the reaction solution is selected from the group consisting of etching liquid and photoresist remover.  
   
   
       15 . The method of inhibiting metal corrosion as claimed in  claim 1 , wherein the metal-containing substrate is immersed in the reaction solution.  
   
   
       16 . The method of inhibiting metal corrosion as claimed in  claim 1 , wherein the reaction solution is sprayed on the metal-containing substrate.  
   
   
       17 . The method of inhibiting metal corrosion as claimed in  claim 1 , wherein the reaction solution is immersed the metal-containing substrate.