US2007123025A1PendingUtilityA1
Forming a barrier layer in joint structures
Est. expiryMar 11, 2025(expired)· nominal 20-yr term from priority
H10W 72/9415H10W 72/952H10W 72/923H10W 72/251H10W 20/038H10W 72/012H10W 72/072H10W 72/241H10P 14/47
47
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Claims
Abstract
Methods of forming a microelectronic structure are described. Embodiments of those methods include forming a barrier layer on a substrate, wherein the barrier layer comprises molybdenum; and forming a lead free interconnect structure on the barrier layer.
Claims
exact text as granted — not AI-modified1 . A structure comprising:
a lead free interconnect structure disposed on a barrier layer, wherein the barrier layer comprises molybdenum.
2 . The structure of claim 1 wherein the barrier layer further comprises a material selected from the group consisting of nickel, cobalt and iron.
3 . The structure of claim 1 wherein the barrier layer comprises a thickness of between about 500 angstroms and about 7 microns.
4 . The structure of claim 1 wherein the barrier layer comprises a molybdenum percentage of between about 5 percent and about 80 percent.
5 . The structure of claim 1 wherein the lead free interconnect structure comprises tin.
6 . The structure of claim 1 wherein the barrier layer is disposed on a copper substrate.
7 . The structure of claim 1 wherein a wetting layer is disposed between the barrier layer and the lead free interconnect structure.
8 . A system comprising:
a lead free interconnect structure disposed on a barrier layer, wherein the barrier layer comprises molybdenum; a bus communicatively coupled to the barrier layer; and a DRAM communicatively coupled to the bus.
9 . The system of claim 8 wherein the barrier layer further comprises a material selected from the group consisting of nickel, cobalt and iron.
10 . The system of claim 8 wherein the barrier layer comprises a thickness of between about 500 angstroms and about 7 microns.
11 . The system of claim 8 wherein the barrier layer comprises a molybdenum percentage of between about 5 percent and about 80 percent.
12 . The system of claim 8 wherein the lead free interconnect structure comprises tin.
13 . The system of claim 8 wherein the lead free interconnect structure is disposed on at least one of an interposer, a motherboard, and a package.
14 . The system of claim 8 wherein the barrier layer is disposed on a copper substrate.
15 . The structure of claim 8 wherein a wetting layer is disposed between the barrier layer and the lead free interconnect structure.Join the waitlist — get patent alerts
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