Valveless micro impedance pump

Abstract

A valveless micro impedance pump including a bottom layer, a middle layer, a top layer and a piezoelectric element. The middle layer and the top layer are sealed to form the water inlets/outlets, flow way, upper and lower vibration membranes and boss of the micropump. The piezoelectric element is fixed on the boss and the fixing seat. By means of the electric field effect, the upper and lower vibration membranes are pushed by the piezoelectric element through the boss. The medium within the flow way is squeezed to flow toward the water inlets/outlets on two sides. The upper and lower vibration membranes have different structures. Also, the hardness of the fixing seat is different from the hardness of the bottom layer. This leads to difference in impedance. Therefore, the wave of the medium can be transmitted.

1 . A valveless micro impedance pump comprising: 
 a bottom layer formed with an opening;    a middle layer overlaid on the bottom layer, the middle layer being formed with an elongated recess in a position corresponding to the position of the opening of the bottom layer, the recess being slightly larger than a width of the opening and serving as a flow way, a bottom area of the middle layer between the flow way and the bottom layer being defined as a lower vibration membrane;    a top layer overlaid on the middle layer, the top layer having a fixing seat, a sink being formed on a nearly central portion of the fixing seat, a boss being disposed in the sink, a first water inlet/outlet being formed between left side of the sink and a left end of the top layer, a second water inlet/outlet being formed between right side of the sink and a right end of the top layer, the water inlets/outlets communicating with the flow way, a bottom area of the sink being defined as an upper vibration membrane; and    a piezoelectric element, a bottom face of the piezoelectric element being lengthwise fixed on top end of the boss and top face of the fixing seat.    
   
   
       2 . The valveless micro impedance pump as claimed in  claim 1 , wherein the piezoelectric element works by way of uni-morph or bi-morph.  
   
   
       3 . The valveless micro impedance pump as claimed in  claim 1 , wherein the bottom layer, middle layer and top layer are made of electrocasting nickel.  
   
   
       4 . The valveless micro impedance pump as claimed in  claim 1 , wherein the bottom layer is made by means of painting photoresistor, exposure, development, washing out photoresistor, micro-electrocasting and removing photoresistor.  
   
   
       5 . The valveless micro impedance pump as claimed in  claim 1 , wherein the middle layer is made by means of painting photoresistor, exposure, development, washing out photoresistor, micro-electrocasting and removing photoresistor.  
   
   
       6 . The valveless micro impedance pump as claimed in  claim 1 , wherein the top layer is made by means of painting photoresistor, exposure, development, washing out photoresistor, micro-electrocasting, secondary photolithography and removing photoresistor.  
   
   
       7 . A valveless micro impedance pump comprising: 
 a bottom layer formed with an opening;    a middle layer overlaid on the bottom layer, the middle layer being formed with an elongated recess in a position corresponding to the position of the opening of the bottom layer, the recess being slightly larger than a width of the opening and serving as a flow way, a bottom area of the middle layer between the flow way and the bottom layer being defined as a lower vibration membrane;    a top layer overlaid on the middle layer, the top layer having a fixing seat, a sink being formed on a nearly central portion of the fixing seat, two bosses being disposed in the sink, a first water inlet/outlet being formed between left side of the sink and a left end of the top layer, a second water inlet/outlet being formed between right side of the sink and a right end of the top layer, the water inlets/outlets communicating with the flow way, a bottom area of the sink being defined as an upper vibration membrane; and    two piezoelectric elements, bottom faces of the piezoelectric elements being respectively lengthwise fixed on top ends of the bosses and top face of the fixing seat.    
   
   
       8 . The valveless micro impedance pump as claimed in  claim 7 , wherein the bottom layer, middle layer and top layer are made of electrocasting nickel.  
   
   
       9 . The valveless micro impedance pump as claimed in  claim 7 , wherein the bottom layer is made by means of painting photoresistor, exposure, development, washing out photoresistor, micro-electrocasting and removing photoresistor.  
   
   
       10 . The valveless micro impedance pump as claimed in  claim 7 , wherein the middle layer is made by means of painting photoresistor, exposure, development, washing out photoresistor, micro-electrocasting and removing photoresistor.  
   
   
       11 . The valveless micro impedance pump as claimed in  claim 7 , wherein the top layer is made by means of painting photoresistor, exposure, development, washing out photoresistor, micro-electrocasting, secondary photolithography and removing photoresistor.