Apparatus and method for minimizing the generation of particles in ultrapure liquids

Abstract

A system and method of reducing particle generation in packaging containers used to transport ultra pure liquids. Particle generation in the containers is reduced by reducing the air-liquid interface present during filling, transport, and dispensing of the liquid.

1 . A collapsed liner, adapted for filling with an ultra pure liquid in a rigid container having the liner disposed therein, said collapsed liner comprising a polymeric material compatible with the ultra pure liquid, defining in an inflated state an interior volume for holding the ultra pure liquid, and being compacted in a collapsed state.  
   
   
       2 . The collapsed liner of  claim 1 , wherein said polymeric material comprises PTFE.  
   
   
       3 . The collapsed liner of  claim 1 , as maintained in a compacted form in said collapsed state by isolation of the interior volume from an ambient environment of the liner.  
   
   
       4 . The collapsed liner of  claim 1 , having a fill tube in communication with the interior volume thereof.  
   
   
       5 . An ultra pure liquid container, including a rigid outer container, and a collapsed liner as claimed in  claim 1  mounted in an interior volume of said rigid outer container.  
   
   
       6 . An ultrapure liquid package, comprising: 
 a rigid container;    a liner adapted to be mounted in said rigid container and having an interior volume to hold the ultrapure liquid;    an assembly including a fill and dispense passage and a gas supply passage, wherein the assembly is adapted for coupling with the rigid container so that the fill and dispense passage is in communication with the interior volume of the liner, and the gas supply passage is in communication with an intermediate area between the rigid container and the liner, and wherein said assembly is adapted to minimize an air-liquid interface of the ultrapure liquid when ultrapure liquid is in the interior volume of the liner.    
   
   
       7 . The ultrapure liquid package of  claim 6 , wherein the assembly includes a probe.  
   
   
       8 . The ultrapure liquid package of  claim 6 , wherein the assembly includes a dip tube.  
   
   
       9 . The ultrapure liquid package of  claim 6 , wherein the assembly includes a fitment.  
   
   
       10 . The ultrapure liquid package of  claim 6 , wherein the assembly includes a vent passage in communication with the interior volume of the liner when the assembly is coupled with the rigid container and the liner is mounted in the rigid container.  
   
   
       11 . The ultrapure liquid package of  claim 6 , comprising the liner mounted in the container in a collapsed state for filling with the ultrapure liquid through the fill and dispense passage.  
   
   
       12 . The ultrapure liquid package of  claim 6 , comprising ultrapure liquid in the interior volume of the liner in a zero or near-zero headspace condition.  
   
   
       13 . The ultrapure liquid package of  claim 6 , wherein the assembly is adapted for pressure dispensing of the ultrapure liquid by flow of gas through the gas supply passage to compress the liner to cause flow of the ultrapure liquid from the liner through the fill and dispense passage of the assembly.  
   
   
       14 . The ultrapure liquid package of  claim 6 , wherein the assembly comprises valves adapted to control flow through the fill and dispense passage and the gas supply passage.  
   
   
       15 . An ultrapure liquid package including: 
 a rigid container;    a liner mounted in said rigid container and having an interior volume to hold the ultrapure liquid; and    an ultrapure liquid in the interior volume of the liner, in a zero headspace condition.    
   
   
       16 . The ultrapure liquid package of  claim 15 , wherein the ultrapure liquid has a particle concentration of less than 2 particles per milliliter for particles at 0.2 μm diameter.  
   
   
       17 . The ultrapure liquid package of  claim 15 , wherein the ultrapure liquid has a particle concentration of less than 1 particle per milliliter for particles at 0.2 μm diameter.  
   
   
       18 . The ultrapure liquid package of  claim 15 , wherein the ultrapure liquid comprises a semiconductor processing liquid.  
   
   
       19 . The ultrapure liquid package of  claim 15 , wherein the ultrapure liquid comprises an LCD market liquid.  
   
   
       20 . The ultrapure liquid package of  claim 15 , wherein the ultrapure liquid comprises a photolithography liquid.  
   
   
       21 . The ultrapure liquid package of  claim 15 , wherein the ultrapure liquid comprises an organic solvent.  
   
   
       22 . The ultrapure liquid package of  claim 15 , wherein the ultrapure liquid comprises an acid.  
   
   
       23 . The ultrapure liquid package of  claim 15 , wherein the ultrapure liquid comprises a base.  
   
   
       24 . The ultrapure liquid package of  claim 15 , wherein the ultrapure liquid comprises a CMP slurry.  
   
   
       25 . An ultrapure liquid package, comprising a rigid container, a liner adapted to be mounted in said rigid container and hold said ultrapure liquid, and a fill and dispense assembly constructed and arranged to minimize air-liquid interface of the ultrapure liquid in the liner during filling of the liner and dispensing of the ultrapure liquid therefrom.  
   
   
       26 . The ultrapure liquid package of  claim 25 , wherein said liner comprises a polymeric material.  
   
   
       27 . The ultrapure liquid package of  claim 26 , wherein said polymeric material comprises PTFE.  
   
   
       28 . The ultrapure liquid package of  claim 25 , wherein the liner is in a collapsed form.  
   
   
       29 . The ultrapure liquid package of  claim 25 , wherein the liner holds an ultrapure liquid.  
   
   
       30 . The ultrapure liquid package of  claim 29 , wherein the ultrapure liquid has a particle concentration of less than 2 particles per milliliter for particles at 0.2 μm diameter.  
   
   
       31 . The ultrapure liquid package of  claim 29 , wherein the ultrapure liquid has a particle concentration of less than 1 particle per milliliter for particles at 0.2 μm diameter.  
   
   
       32 . The ultrapure liquid package of  claim 29 , wherein the ultrapure liquid comprises a semiconductor processing liquid.  
   
   
       33 . The ultrapure liquid package of  claim 29 , wherein the ultrapure liquid comprises an LCD market liquid.  
   
   
       34 . The ultrapure liquid package of  claim 29 , wherein the ultrapure liquid comprises a photolithography liquid.  
   
   
       35 . The ultrapure liquid package of  claim 29 , wherein the ultrapure liquid comprises an organic solvent.  
   
   
       36 . The ultrapure liquid package of  claim 29 , wherein the ultrapure liquid comprises an acid.  
   
   
       37 . The ultrapure liquid package of  claim 29 , wherein the ultrapure liquid comprises a base.  
   
   
       38 . The ultrapure liquid package of  claim 29 , wherein the ultrapure liquid comprises a CMP slurry.  
   
   
       39 . An ultrapure liquid package, comprising: 
 a rigid container;    a liner adapted to be mounted in said rigid container and having an interior volume to hold the ultrapure liquid; and    means for minimizing an air-liquid interface of the ultrapure liquid when ultrapure liquid is in the interior volume of the liner.    
   
   
       40 . The ultrapure liquid package of  claim 39 , wherein said means comprise a probe.  
   
   
       41 . The ultrapure liquid package of  claim 39 , wherein said means comprise a dip tube.  
   
   
       42 . The ultrapure liquid package of  claim 39 , wherein said means comprise a fitment.  
   
   
       43 . The ultrapure liquid package of  claim 39 , wherein said means comprise a passage communicating with the space between the rigid container and the liner when mounted in the rigid container, and adapted for flowing pressurizing gas into said space to compress the liner during dispensing of said ultrapure liquid.  
   
   
       44 . The ultrapure liquid package of  claim 39 , wherein the liner is mounted in a collapsed state in the rigid container.  
   
   
       45 . The ultrapure liquid package of  claim 39 , wherein said liner comprises a polymeric material.  
   
   
       46 . The ultrapure liquid package of  claim 39 , wherein said liner comprises a PTFE material.