Cleaning sheets, transfer member having cleaning function, and method of cleaning substrate-processing apparatus with these

Abstract

A cleaning sheet which comprises a porous layer as a cleaning layer; or a cleaning sheet which comprises a sheet material having a porous layer and, formed on one side of the sheet material, an adhesive layer.

1 - 15 . (canceled)  
     
     
         16 . A transfer member having a cleaning function, which comprises a transfer member and a cleaning sheet comprising a sheet material having a porous layer and, formed on one side of the sheet material, an adhesive layer, wherein the cleaning sheet is provided to the transfer member through the adhesive layer.  
     
     
         17 . The transfer member having a cleaning function according to  claim 16 , wherein the cleaning sheet has a smaller shape than the transfer member and does not protrude from the edges of the transfer member.  
     
     
         18 . The transfer member having a cleaning function according to  claim 17 , wherein the porous layer has substantially no tackiness.  
     
     
         19 . The transfer member having a cleaning function according to  claim 17 , wherein the porous layer is a porous film comprising ultrahigh-molecular weight polyethylene.  
     
     
         20 . The transfer member having a cleaning function according to  claim 17 , wherein the porous layer contains a heat-resistant polymeric resin.  
     
     
         21 . A transfer member having a cleaning function, which comprises a transfer member and a cleaning sheet comprising a base material, a porous layer formed as a cleaning layer on one side of the base material, and an adhesive layer formed on the other side of the base material, wherein the cleaning sheet is provided to the transfer member through the adhesive layer.  
     
     
         22 . The transfer member having a cleaning function according to  claim 21 , wherein the cleaning sheet has a smaller shape than the transfer member and does not protrude from the edges of the transfer member.  
     
     
         23 . The transfer member having a cleaning function according to  claim 21 , wherein the porous layer has substantially no tackiness.  
     
     
         24 . The transfer member having a cleaning function according to  claim 21 , wherein the porous layer is a porous film comprising ultrahigh-molecular weight polyethylene.  
     
     
         25 . The transfer member having a cleaning function according to  claim 21 , wherein the porous layer contains a heat-resistant polymeric resin.