US2007099338A1PendingUtilityA1

Capacitor with a Dielectric Including a Self-Organized Monolayer of an Organic Compound

Assignee: INFINEON TECHNOLOGIES AGPriority: Feb 2, 2004Filed: Dec 15, 2006Published: May 3, 2007
Est. expiryFeb 2, 2024(expired)· nominal 20-yr term from priority
H05K 1/162H01G 4/18
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Claims

Abstract

A capacitor is formed that includes a self-organized monolayer of an organic compound between two electrodes.

Claims

exact text as granted — not AI-modified
1 . A method for producing a capacitor comprising: 
 depositing a first electrode;    bringing the first electrode into contact with an organic compound to deposit a monolayer of the organic compound on the first electrode so as to form a structure of the first electrode and the organic compound; and    depositing a second electrode.    
   
   
       2 . The method of  claim 1 , wherein the organic compound is brought into contact with the first electrode in a solution, and the method further comprises: 
 rinsing the structure with solvent to remove excess organic compound in solution from the structure prior to depositing the second electrode; and    evaporating the solvent prior to depositing the second electrode.    
   
   
       3 . The method of  claim 2 , wherein the concentration of the organic compound in the solution is between 10 −4 % and 1% by weight.  
   
   
       4 . The method of  claim 2 , wherein the solvent comprises a dried, low-polarity, aprotic solvent.  
   
   
       5 . The method of  claim 4 , wherein the solvent comprises one of toluene, tetrahydrofuran, and cyclohexane.  
   
   
       6 . The method of  claim 2 , further comprising: 
 after rinsing the structure with solvent and prior to depositing the second electrode, further rinsing the structure with volatile solvents.    
   
   
       7 . The method of  claim 1 , wherein the organic compound is brought into contact with the first electrode in a gas phase to deposit the monolayer of the organic compound on the first layer.  
   
   
       8 . The method of  claim 7 , wherein the pressure during the gas phase deposition of the organic compound is between 10 −6  mbar and 400 mbar.  
   
   
       9 . The method of  claim 6 , wherein the temperature during the gas phase deposition of the organic compound is between 80° C. and 200° C.  
   
   
       10 . The method of  claim 6 , wherein the gas phase deposition of the organic compound is carried out over a time period of between 3 min and 24 hours.  
   
   
       11 . The method of  claim 1 , wherein the second electrode is vapor-deposited.

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