US2007079559A1PendingUtilityA1

Cerium carbonate powder, method for preparing the same, cerium oxide powder made therefrom, method for preparing the same, and CMP slurry comprising the same

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Individually held — no corporate assignee on recordPriority: Sep 20, 2005Filed: Sep 19, 2006Published: Apr 12, 2007
Est. expirySep 20, 2025(expired)· nominal 20-yr term from priority
Inventors:Myoung Hwan OhJun Seok NhoJong Pil KimJang-Yul KimSeung Beom Cho
C01F 17/247C01P 2002/72C01P 2004/61C01P 2004/62C01P 2004/03C01F 17/235C01P 2004/64C01F 17/10
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Claims

Abstract

Disclosed is a method for preparing cerium carbonate powder by mixing a cerium precursor solution with a carbonate precursor solution to cause precipitation, wherein at least one solvent used in the cerium precursor solution and the carbonate precursor solution is an organic solvent. Cerium carbonate powder obtained from the method, cerium oxide powder obtained from the cerium carbonate powder, a method for preparing the cerium oxide powder, and CMP slurry comprising the cerium oxide powder are also disclosed. The method for preparing cerium carbonate using an organic solvent, allows the resultant cerium carbonate powder to have a size and shape controllable from the initial nucleation step. Additionally, it is possible to easily control the size and shape of cerium oxide powder obtained from the cerium carbonate powder.

Claims

exact text as granted — not AI-modified
1 . A method for preparing cerium carbonate powder by mixing a cerium precursor solution with a carbonate precursor solution to cause precipitation, wherein at least one solvent used in the cerium precursor solution and the carbonate precursor solution is an organic solvent.  
   
   
       2 . The method according to  claim 1 , wherein the organic solvent has a dielectric constant ranging from 20 to 80.  
   
   
       3 . The method according to  claim 1 , wherein the organic solvent is at least one solvent selected from the group consisting of alcohols, glycols, acetone, glycerol, formic acid and ethyl acetate.  
   
   
       4 . The method according to  claim 1 , wherein the cerium precursor is cerium nitrate or cerium acetate.  
   
   
       5 . The method according to  claim 1 , wherein the carbonate precursor is ammonium carbonate.  
   
   
       6 . The method according to  claim 1 , wherein the cerium carbonate solution and the carbonate precursor solution are used in a molar ratio ranging from 1:0.5 to 1:5.  
   
   
       7 . The method according to  claim 1 , wherein the precipitation is carried out at a temperature ranging from 60° C. to the boiling point of the organic solvent used therein.  
   
   
       8 . The method according to  claim 1 , wherein the precipitation is carried out for 30 minutes˜60 hours.  
   
   
       9 . The method according to  claim 1 , wherein the cerium carbonate powder obtained from the method has a size of 50 nm˜5 μm.  
   
   
       10 . Cerium carbonate powder in which carbon residue other than carbonate group (—CO 3 ) remains in an amount of 0.1 ppm˜100 ppm.  
   
   
       11 . The cerium carbonate powder according to  claim 10 , which is obtained by the method as defined in  claim 1 .  
   
   
       12 . The cerium carbonate powder according to  claim 10 , which is obtained by the method as defined in  claim 2 .  
   
   
       13 . The cerium carbonate powder according to  claim 10 , which is obtained by the method as defined in  claim 5 .  
   
   
       14 . The cerium carbonate powder according to  claim 10 , which is obtained by the method as defined in  claim 9 .  
   
   
       15 . A method for preparing cerium oxide powder, which comprises the steps of: 
 (a) preparing cerium carbonate powder by mixing a cerium precursor solution with a carbonate precursor solution to cause precipitation, wherein at least one solvent used in the cerium precursor solution and the carbonate precursor solution is an organic solvent; and    (b) firing the cerium carbonate powder obtained from the step(a) at a heat treatment temperature of 300° C.˜1000° C.    
   
   
       16 . The method for preparing cerium oxide powder according to  claim 15 , wherein the organic solvent has a dielectric constant ranging from 20 to 80.  
   
   
       17 . The method for preparing cerium oxide powder according to  claim 15 , wherein the carbonate precursor is ammonium carbonate.  
   
   
       18 . The method for preparing cerium oxide powder according to  claim 15 , wherein the cerium carbonate powder obtained from the step(a) has a size of 50 nm˜5 μm.  
   
   
       19 . Cerium oxide powder obtained by the method as defined in  claim 15 .  
   
   
       20 . CMP slurry comprising 100 parts by weight of cerium oxide powder obtained by the method as defined in  claim 15 , and 0.001˜10 parts by weight of a dispersant.

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