Diaphragm pump

Abstract

A diaphragm pump is provided. The diaphragm pump comprises a housing that comprises a concave portion, a suction port and a discharge port; a diaphragm; a first and second pump chamber; and a suction-side check valve and a discharge-side check valve. The suction-side and discharge-side check valves are more distant from the diaphragm in the inner end side of the suction and discharge ports and are closer to the diaphragm in the outer end side of the suction and discharge ports.

1 . A diaphragm pump comprising: 
 a housing that comprises a concave portion, a suction port and a discharge port;    a diaphragm;    a first and second pump chamber; and    a suction-side check valve and a discharge-side check valve,    wherein the suction-side and discharge-side check valves are more distant from the diaphragm in the inner end side of the suction and discharge ports and are closer to the diaphragm in the outer end side of the suction and discharge ports.    
   
   
       2 . The diaphragm pump according to  claim 1 , wherein the axis lines of the suction and discharge ports are extended in parallel with an extending plane of the diaphragm.  
   
   
       3 . The diaphragm pump according to  claim 1 , wherein the axis lines of the suction and discharge ports are not parallel with the extending plane of the diaphragm and is slanted with respect to the extending plane of the diaphragm so that an angle between the axis lines of the suction and discharge ports and the extending plane of the diaphragm is smaller than an angle between the extending plane of the diaphragm and a plane where the suction-side and discharge-side check valves are provided.  
   
   
       4 . The diaphragm pump according to  claim 1 , wherein the suction-side and discharge-side check valves are formed as suction-side and discharge-side check valve units that are separate from the housing, and the suction-side and discharge-side check valve units are attached to pump chamber-side opening ends of the suction and discharge ports.  
   
   
       5 . The diaphragm pump according to  claim 4 , wherein the suction-side and discharge-side check valve units are provided on the same substrate.  
   
   
       6 . The diaphragm pump according to  claim 1 , wherein the check valves have an umbrella shape.  
   
   
       7 . The diaphragm pump according to  claim 1 , wherein the diaphragm is a piezoelectric oscillator.  
   
   
       8 . The diaphragm pump according to  claim 1 , wherein the diaphragm obturates the concave portion.  
   
   
       9 . The diaphragm pump according to  claim 1 , the pump chambers are partitioned by the concave portion and an oscillating diaphragm.  
   
   
       10 . The diaphragm pump according to  claim 1 , wherein the suction port and the discharge port are formed in a direction along a plane of the diaphragm and of which inner ends communicate with the pump chamber.  
   
   
       11 . The diaphragm pump according to  claim 1 , wherein the suction-side check valve is provided between the inner end of the suction port and the pump chamber, and a discharge-side check valve is provided between the inner end of the discharge port and the pump chamber.  
   
   
       12 . The diaphragm pump according to  claim 1 , wherein the suction-side and discharge-side check valves are slanted with respect to a plane which is perpendicular to the diaphragm and contains an axis line of the suction port and a plane which is perpendicular to the diaphragm and contains an axis line of the discharge port.  
   
   
       13 . The diaphragm pump according to  claim 1 , wherein the diaphragm is an electrostriction oscillator.