Diaphragm pump

Abstract

A diaphragm pump is provided. The diaphragm pump comprises an upper and lower housing, a pump chamber plate, a pair of pump chambers, and a diaphragm that separates the pair of pump chambers. First and second suction-side check valves are disposed between the pair of pump chambers and a suction port. First and second discharge-side check valves are disposed between the pair of pump chambers and a discharge port. The lower housing comprises a first pump chamber concave portion. The pump chamber plate comprises a second pump chamber concave portion, the second suction-side check valve, and the second discharge-side check valve. An interplate suction-side channel and an interplate discharge-side channel are provided between the upper housing and the pump chamber plate.

1 . A diaphragm pump comprising: 
 an upper and lower housing;    a pump chamber plate;    a pair of pump chambers;    a diaphragm that separates the pair of pump chambers;    first and second suction-side check valves between the pair of pump chambers and a suction port; and    first and second discharge-side check valves between the pair of pump chambers and a discharge port,    wherein the lower housing comprises a first pump chamber concave portion,    wherein the pump chamber plate comprises a second pump chamber concave portion, the second suction-side check valve, and the second discharge-side check valve, and    wherein an interplate suction-side channel and an interplate discharge-side channel are provided between the upper housing and the pump chamber plate.    
   
   
       2 . The diaphragm pump according to  claim 1 , wherein the suction port includes the first suction-side check valve in communication with the first pump chamber forming concave portion, and the discharge port includes the first discharge-side check valve in communication with the first pump chamber forming concave portion.  
   
   
       3 . The diaphragm pump according to  claim 2 , wherein the interplate suction-side channel is bifurcated from the suction port of the lower housing and connected to the second suction-side check valve and the interplate discharge-side channel is bifurcated from the discharge port of the lower housing and connected to the second discharge-side check valve.  
   
   
       4 . The diaphragm pump according to  claim 3 , wherein the interplate suction-side channel and the interplate discharge-side channel are sealed with a seal ring inserted between the pump chamber plate and the upper housing.  
   
   
       5 . The diaphragm pump according to  claim 4 , wherein one end of the interplate suction-side channel and one end of the interplate discharge-side channel communicate with the second suction-side check valve and the second discharge-side check valve, and the other ends of the interplate suction-side channel and the interplate discharge-side channel communicate with the channels bifurcated from the suction and discharge ports that open to the lower housing.  
   
   
       6 . The diaphragm pump according to  claim 4 , wherein the seal ring has an oval shape.  
   
   
       7 . The diaphragm pump according to  claim 1 , wherein the first suction-side check valve and the first discharge-side check valve are formed as a first suction-side check valve unit and a first discharge-side check valve unit that are separate from the lower housing, and the first suction-side check valve unit and the first discharge-side check valve unit are attached to pump chamber-side opening ends of the suction and discharge ports.  
   
   
       8 . The diaphragm pump according to  claim 7 , wherein the first suction-side check valve unit and the first discharge-side check valve unit are provided on the same substrate.  
   
   
       9 . The diaphragm pump according to  claim 1 , wherein the suction and discharge ports of the lower housing are protruded in parallel with each other in the plane direction of the diaphragm in a free state.  
   
   
       10 . The diaphragm pump according to  claim 1 , wherein the check valve has an umbrella shape.  
   
   
       11 . The diaphragm pump according to  claim 1 , wherein the diaphragm is a piezoelectric oscillator or an electrostriction oscillator.  
   
   
       12 . The diaphragm pump according to  claim 1 , wherein the diaphragm is a bimorph type piezoelectric oscillator.