US2007062450A1PendingUtilityA1

Production apparatus for magnetic recording medium

Assignee: TDK CORPPriority: Mar 5, 2003Filed: Nov 17, 2006Published: Mar 22, 2007
Est. expiryMar 5, 2023(expired)· nominal 20-yr term from priority
G11B 5/743G11B 5/74G11B 5/855G11B 5/851G11B 11/10582B82Y 10/00C23C 16/00G11B 5/84
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Claims

Abstract

A production apparatus, which enable the efficient production of a discrete type magnetic recording medium, while reliably preventing any deterioration of the partitioned recording elements. The magnetic recording medium production apparatus includes: recording layer processing device, which by forming a plurality of grooves, with a spacing therebetween in a planar direction, in an intermediate product of a magnetic recording medium comprising a continuous recording layer, partitions the continuous recording layer into a plurality of partitioned recording elements; non-magnetic body filling device for filling the grooves between the partitioned recording elements with a non-magnetic body; protective layer formation device for forming a protective layer on the partitioned recording elements and the non-magnetic body; and vacuum retention device which houses the recording layer processing device, the non-magnetic body filling device, and the protective layer formation device, and maintains the environment surrounding the intermediate product in a state of vacuum.

Claims

exact text as granted — not AI-modified
1 . A production apparatus for a magnetic recording medium comprising: 
 recording layer processing device, which by forming a plurality of grooves, with a spacing therebetween in a planar direction, in an intermediate product produced by forming a continuous recording layer on top of a substrate surface, partitions said continuous recording layer into a plurality of partitioned recording elements;    non-magnetic body filling device for filling said grooves between said partitioned recording elements with a non-magnetic body;    protective layer formation device for forming a protective layer that protects said partitioned recording elements and said non-magnetic body; and    vacuum retention device, which houses said recording layer processing device, said non-magnetic body filling device and said protective layer formation device, and maintains an environment surrounding said intermediate product in a state of vacuum.    
     
     
         2 . The production apparatus for a magnetic recording medium according to  claim 1 , wherein 
 dry process cleaning device for removing foreign matter from an environment surrounding said partitioned recording elements using either one of a gas and a plasma is provided inside said vacuum retention device.    
     
     
         3 . The production apparatus for a magnetic recording medium according to  claim 1 , wherein 
 barrier film formation device for forming a barrier film on said partitioned recording elements using either one of a plasma CVD method and a sputtering method is provided inside said vacuum retention device.    
     
     
         4 . The production apparatus for a magnetic recording medium according to  claim 1 , wherein 
 smoothing device for smoothing a surface of said partitioned recording elements and said non-magnetic body is provided inside said vacuum retention device.

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