Cmp slurry delivery system and method of mixing slurry thereof

Abstract

A CMP slurry delivery system includes a delivery pipe, a first slurry supply reservoir coupled to the delivery pipe for supplying an abrasive, a second slurry supply reservoir coupled to the delivery pipe for supplying a clean chemical, a third slurry supply reservoir coupled to the delivery pipe for supplying a corrosion inhibitor, and a fourth slurry supply reservoir for supplying an oxidizer.

1 . A method of mixing slurry comprising: 
 providing a delivery pipe communicating with a polishing device of a chemical mechanical polishing apparatus at a first end, the delivery pipe further comprising a first inlet, a second inlet, a third inlet, and a fourth inlet, the first inlet being positioned far from the first end, the fourth inlet being positioned closer to the first end, the second inlet and the third inlet being positioned between the first inlet and the fourth inlet;    implanting an abrasive into the delivery pipe via the first inlet;    implanting a clean chemical into the delivery pipe via the second inlet;    implanting a corrosion inhibitor into the delivery pipe via the third inlet; and    implanting an oxidizer into the delivery pipe via the fourth inlet;    wherein the first inlet, the second inlet, the third inlet, and the fourth inlet each comprise a check valve; and the abrasive, the clean chemical, the corrosion inhibitor, and the oxidizer are rapidly mixed in the delivery pipe and directly delivered to the polishing device.    
   
   
       2 . The method of  claim 1 , wherein the second inlet is positioned between the first inlet and the third inlet.  
   
   
       3 . The method of  claim 1 , wherein the third inlet is positioned between the first inlet and the second inlet.  
   
   
       4 . The method of  claim 1 , wherein the abrasive is selected from a group consisting of alumina, silica, and silica fume.  
   
   
       5 . The method of  claim 1 , wherein the oxidizer is selected from a group consisting of hydrogen peroxide and ferric nitrate.  
   
   
       6 . The method of  claim 1 , wherein the clean chemical is selected from a group consisting of citric acid and oxalic acid.  
   
   
       7 . The method of  claim 1 , wherein the corrosion inhibitor is selected from a group consisting of benzotrazole (BTA), 2-mercapto-benzothiazole (MBT), benzimidazole (BIA), tolyltrizole (TTA), 5-hexyl-1,2,3-benzotriazole (C6BTA), 3-amino-5-heptyl-1,2,4-triazole (AHT), 2-amino-thiazole (AZT), 2-amino-4,6-dimethyl-parimidine (ADMP), 3-phenyl-1,2,4-triazole (PTH), 3-phenyl-1,2,4-triazole-5-one, piperidine, phenyl-amino-triazine-dithiol (PTD), potassium ethylxanthate (KEX), benzylamine (BZA), ethanolamine, and sodium tripolyphosphate.  
   
   
       8 . The method of  claim 1 , further comprising a step of purging the delivery pipe with a DI water purger.