US2007056454A1PendingUtilityA1

System and apparatus for forming an imprinting tool

Assignee: INTEL CORPPriority: Jun 5, 2003Filed: Oct 27, 2006Published: Mar 15, 2007
Est. expiryJun 5, 2023(expired)· nominal 20-yr term from priority
Inventors:Michael Walk
H05K 3/107B29C 33/3842B29C 33/40H05K 3/0002H05K 2203/0108B33Y 80/00
51
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Claims

Abstract

Numerous embodiments of a method and apparatus for forming an imprinting tool are disclosed. In one embodiment, an apparatus for forming a substrate-imprinting tool comprises a build platform configured to receive material, a first mold formed on the build platform, the first mold having first mold feature surfaces, and a second mold formed on the first mold feature surfaces, wherein at least a portion of the second mold is metalized.

Claims

exact text as granted — not AI-modified
1 . A substrate-imprinting tool comprising: 
 a feature surface; and    a base integral with the feature surface, the feature surface and the base substantially formed from molded metal, wherein the feature surface is configured to form one or more features on a substrate.    
   
   
       2 . The imprinting tool of  claim 1 , wherein the feature surface and the base are substantially comprised of metal.  
   
   
       3 . The imprinting tool of  claim 1 , wherein the feature surface is formed at least in part with one or more molds.  
   
   
       4 . The imprinting tool of  claim 1 , wherein the molded metal is selected from the group consisting of nickel, copper, aluminum, and any combination thereof.  
   
   
       5 . The imprinting tool of  claim 1 , wherein the substrate comprises an electronic device substrate.  
   
   
       6 . The imprinting tool of  claim 1 , wherein the feature surface comprises features configured to imprint one or more features on a resin substrate.  
   
   
       7 . An apparatus for forming a substrate-imprinting tool comprising: 
 a build platform;    a first mold formed on the build platform with deposited material, the first mold having first mold feature surfaces; and    a second mold formed on the first mold feature surfaces, wherein at least a portion of the second mold is metalized.    
   
   
       8 . The apparatus of  claim 7  wherein the imprinting tool is annealed, machined or polished.  
   
   
       9 . The apparatus of  claim 7  wherein the deposited material is a curable polymer resin.  
   
   
       10 . The apparatus of  claim 7  wherein at least a portion of the first mold is metalized.  
   
   
       11 . The apparatus of  claim 10  wherein metal used to metalize the first mold is selected from the group consisting of nickel, copper, aluminum and any combination thereof.  
   
   
       12 . The apparatus of  claim 7  wherein at least a portion of the second mold is formed with coated material.  
   
   
       13 . The apparatus of  claim 12  wherein the coated material is a curable polymer.  
   
   
       14 . The apparatus of  claim 13  wherein metal used to metalize the second mold is selected from the group consisting of nickel, copper, aluminum and any combination thereof.  
   
   
       15 . A system for forming a substrate-imprinting tool comprising: 
 a build platform;    an ink jet head coupled to the build platform and configured to traverse the build platform and deposit material thereon;    a first mold formed on the build platform with deposited material, the first mold having first mold feature surfaces; and    a second mold formed on the first mold feature surfaces, wherein at least a portion of the second mold is metalized.    
   
   
       16 . The system of  claim 15  further comprising means for curing the deposited material.  
   
   
       17 . The system of  claim 16  wherein the means for curing the deposited material is an ultraviolet lamp.  
   
   
       18 . The system of  claim 15  wherein at least a portion of the first mold is metalized.  
   
   
       19 . The system of  claim 15  wherein at least a portion of the second mold is formed with coated material.  
   
   
       20 . The system of  claim 19  further comprising temperature elevating means to cure the coated material.

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