Droplet applying method and droplet applying device, and device and electronic equipment
Abstract
Exemplary embodiments enable formation of a uniform film and a pattern with a minute line width and generate no or substantially no quality defects, such as disconnection. A droplet is discharged from a droplet discharging head to apply in a predetermined region on a surface of a substrate while relatively moving the droplet discharging head and the substrate. The droplet is discharged with respect to the surface of the substrate in a direction intersecting with a vertical direction, and when relatively moving the droplet discharging head and the substrate to discharge the droplet, the droplet is discharged along the relative movement direction.
Claims
exact text as granted — not AI-modified1 . A droplet applying device for use with a substrate surface, the droplet applying device, comprising:
a droplet discharging head that discharges a droplet to apply on the substrate surface, the droplet discharging head being arranged in an inclined state with respect to a direction perpendicular to the substrate surface so as to discharge the droplet in a direction intersecting the direction perpendicular to the substrate surface.
2 . A device manufactured by applying a droplet on a surface of a substrate, the droplet being applied by a droplet applying method, comprising:
discharging the droplet from a droplet discharging head to apply in a predetermined region on a substrate surface, while relatively moving the droplet discharging head and the substrate, the discharging including: discharging the droplet to the substrate surface in a direction intersecting a vertical direction, and discharging, when the droplet discharging head and the substrate are relatively moved to discharge the droplet, the droplet along the relative movement direction.
3 . Electronic equipment, comprising:
the device according to claim 2.Join the waitlist — get patent alerts
Track US2007054060A1 — get alerts on status changes and closely related new filings.
We store only your email — no account needed. See our privacy policy.