Apparatus for fabricating a display device

Abstract

Apparatus for fabricating a display device includes a stage capable of mounting an insulating substrate of the display device and moving the insulating substrate, linear scales which detect a position or moving distance of the substrate, a laser oscillator which generates continuous-waves laser light, a modulator which turns ON/OFF the continuous-wave laser light, a beam forming optic which shapes the continuous-wave laser light passing through the modulator into a linear or rectangular form, an objective lens which projects the at least one of the laser light on the insulating substrate so as to irradiate the insulating substrate with the laser light. The controller counts signals generated by the linear scales for every movement of the stage for a given distance, causes the modulator to turn the generated continuous-wave laser light in an ON state at time when a position of the insulating substrate on which the laser light irradiation is to be started reaches an area on which the laser light is projected, and causes the modulator to turn the generated continuous-wave laser light in an OFF state at another time.

1 . An apparatus for fabricating a display device, comprising: 
 a stage capable of mounting an insulating substrate of the display device and moving the insulating substrate;    at least one position sensor which detects at least one of a position and moving distance of the substrate;    a laser oscillator which generates continuous-waves laser light;    a modulator which turns ON/OFF the continuous-wave laser light generated by the laser oscillator;    a beam forming optic which shapes the continuous-wave laser light passing through the modulator into at least one of a linear and rectangular form;    an objective lens which projects the at least one of linear and rectangular laser light on the insulating substrate so as to irradiate the insulating substrate with the at least one of linear and rectangular laser light; and    a controller which counts signals generated by the at least one position sensor for every movement of the stage for a given distance, which causes the modulator to turn the generated continuous-wave laser light in an ON state at time when a position of the insulating substrate on which the laser light irradiation is to be started reaches an area on which the at least one of linear and rectangular laser light is projected, and which causes the modulator to turn the generated continuous-wave laser light in an OFF state at time when another position of the insulating substrate on which the laser light irradiation is to be stopped reaches the area;    wherein a plurality of regions on the substrate are irradiated with the continuous-wave laser light in a state when the substrate is kept in continuous movement.    
   
   
       2 . An apparatus for fabricating a display device according to  claim 1 , 
 wherein the modulator is an electro-optical modulator.    
   
   
       3 . An apparatus for fabricating a display device according to  claim 1 , 
 wherein the insulating substrate is a substrate with an amorphous semiconductor film of a granular polycrystalline semiconductor film formed thereon.    
   
   
       4 . An apparatus for fabricating a display device according to  claim 1 , 
 wherein the continuous-wave laser light is light of a second harmonics of a laser diode pumped YVO 4  continuous wave laser.    
   
   
       5 . An apparatus for fabricating a display device according to  claim 1 , 
 wherein a plurality of laser oscillators, a plurality of modulators, a plurality of beam forming optics, and a plurality of objective lenses are provided; and wherein a plurality of spots on the insulating substrate which is mounted on the stage are simultaneously irradiated with the laser light.    
   
   
       6 . An apparatus for fabricating a display device, comprising: 
 a stage capable of mounting an insulating substrate of the display device and moving the insulating substrate;    at least one position sensor which detects at least one of a position and moving distance of the substrate;    a laser oscillator which generates continuous-wave laser light;    a modulator which turns ON/OFF the continuous-wave laser light generated by the laser oscillator;    a beam forming optics which shapes the continuous-wave laser light passing through the modulator into at least one of a linear and rectangular form;    an objective lens which projects the at least one of linear and rectangular laser light on the insulating substrate so as to irradiate the insulating substrate with the at least one of linear and rectangular laser light; and    a controller which counts signals generated by the at least one position sensor for every movement of the stage for a given distance, which causes the modulator to turn the generated continuous-wave laser light in an ON state at time when a position of the insulating substrate on which the laser light irradiation is to be started which reaches an area on which the at least one of linear and rectangular laser light is projected, and which causes the modulator to turn the generated continuous-wave laser light in an OFF state at time when a preset time has elapsed from the start of the laser light irradiation; and    wherein a plurality of regions on the substrate are irradiated with the continuous-wave laser light in a state when the substrate is kept in continuous movement.    
   
   
       7 . An apparatus for fabricating a display device according to  claim 1 , 
 wherein the at least one position sensor includes a plurality of linear scales, each of the linear scales being installed in the stage.    
   
   
       8 . An apparatus for fabricating a display device according to  claim 1 , 
 wherein the at least one position sensor includes a plurality of measuring machines, each of the measuring means enabling measurement using laser light interference.    
   
   
       9 . An apparatus for fabricating a display device according to  claim 1 , 
 wherein the at least one position sensor includes a plurality of rotary encoders, each of the rotary encoders being installed on an axis of a motor which drives the stage.    
   
   
       10 . An apparatus for fabricating a display device according to  claim 6 , 
 wherein the at least one position sensor includes a plurality of linear scales, each of the linear scales being installed in the stage.    
   
   
       11 . An apparatus for fabricating a display device according to  claim 6 , 
 wherein the at least one position sensor includes a plurality of measuring machines, each of the measuring means enabling measurement using laser light interference.    
   
   
       12 . An apparatus for fabricating a display device according to  claim 6 , 
 wherein the at least one position sensor includes a plurality of rotary encoders, each of the rotary encoders being installed on the axis of a motor driving the stage.