Driving unit, exposure apparatus using the same, and device fabrication method

Abstract

A driving unit includes an actuator for actuating a target and a magnetic dampener for controlling a vibration of the target, wherein the driving unit controls the vibration of the target, which is generated by the actuation of the actuator, by using the magnetic dampener.

1 . A driving unit comprising: 
 an actuator for actuating a target; and    a magnetic dampener for controlling a vibration of the target,    wherein said magnetic damper includes:    a conductor plate fixed to one of the target and a structure that is supported movable to the target; and    a magnet fixed to the other of the target and the structure to face the conductor plate, and    wherein said magnetic damper controls the vibration of the target generated by a driving of the actuator using a damping force that is effected when the conductor plate crosses a magnetic field of the magnet.    
   
   
       2 . A driving unit according to  claim 1 , further comprising a magnetic spring, wherein the driving unit controls the vibration of the target by using the magnetic spring and the magnetic damper.  
   
   
       3 . A driving unit according to  claim 1 , wherein the actuator comprises a piezoelectric element.  
   
   
       4 . A driving unit according to  claim 1 , further comprising: 
 a magnetic flux generator for generating a magnetic flux in a first direction; and    a coil having a straight part along a second direction perpendicular to the first direction, wherein said driving unit controls the vibration of the target in a third direction perpendicular to both the first and the second directions.    
   
   
       5 . A driving unit according to  claim 4 , wherein the coil is fixed to the target, and the magnetic flux generator is fixed to a structure supported independently from the target.  
   
   
       6 . A driving unit according to  claim 4 , wherein the coil comprises a first straight part and a second straight part in which a current flow in a direction opposite to the flow direction in the first straight part, and the magnetic flux near the first straight part is substantially opposite to that near the second straight part.  
   
   
       7 . A driving unit according to  claim 1 , wherein the target comprises an optical element.  
   
   
       8 . A driving unit according to  claim 4 , wherein the optical element is a reflection element.  
   
   
       9 . A driving unit comprising: 
 an actuator for actuating a target; and    a vibration control block having a vibration control material inserted in a hollow part, wherein the driving unit controls the vibration of the target, which is generated by the actuation of the actuator, by using the vibration control block.    
   
   
       10 . A vibration control block according to  claim 9 , wherein the vibration control material has a damping coefficient of 10 to 10 3  Ns/m.  
   
   
       11 . A vibration control block according to  claim 9 , wherein the vibration control block is a flat shape.  
   
   
       12 . A vibration control block according to  claim 9 , wherein the vibration control block is a rotational symmetrical shape.  
   
   
       13 . A vibration control block according to  claim 9 , wherein the vibration control material is any one of foam rubber, gel, oil, or grease.