Method for making devices using ink jet printing

Abstract

Methods for using ink-jet printing to deposit various layers of micro-structure devices are provided. A wide variety of micro-structures may be formed using these techniques including, for example, many forms of MEMs structures as well as other structures.

1 . A method of forming an electrostatic actuator comprising: 
 providing a first flexible member having a first electrode adjacent a dielectric;    providing a second flexible member having a second electrode adjacent a dielectric;    wherein the first flexible member and the second flexible member are configured and connected together to define a chamber having an open state and a closed state; and    providing a sensor adjacent the first flexible member and/or the second flexible member to provide an indication of whether the chamber is in the open state or the closed state.    
   
   
       2 . The method of  claim 1  wherein the sensor is a FET.  
   
   
       3 . The method of  claim 1  wherein the sensor is a capacitor.  
   
   
       4 . The method of  claim 1  wherein the sensor is a relay.  
   
   
       5 . The method of  claim 1  wherein the sensor is a piezoelectric element.  
   
   
       6 . The method of  claim 1  wherein the first sensor is a piezoresistive element.  
   
   
       7 . The method of  claim 1  wherein at least part of the sensor is ink-jet printed.  
   
   
       8 . A method for forming an electrostatic actuator that includes a flexible structure having a number of electrodes, wherein the flexible structure is adapted to be expanded to create a number of open spaces within the flexible structure, wherein the number of electrodes are disposed so that, when the flexible structure is expanded, pairs of electrodes are separated by the open spaces, the method comprising the step of ink-jet printing at least part of the flexible structure.  
   
   
       9 . The method of  claim 8  comprising the step of ink-jet printing the electrodes.  
   
   
       10 . The method of  claim 8  wherein the flexible structure includes flexible layers that support the number of electrodes, the method comprising the step of ink-jet printing the flexible layers.