III/V-semiconductor

Abstract

The invention relates to a monolithic integrated semiconductor structure comprising a carrier layer on the basis of doped Si or doped GaP and a III/V semiconductor disposed thereupon and having the composition Ga x In y N a As b P c Sb d , wherein x=70-100 mole-%, y=0-30 mole-%, a=0.5-15 mole-%, b=67.5-99.5 mole-%, c=0-32.0 mole-% and d=0-15 mole-%, wherein the total of x and y is always 100 mole-%, wherein the total of a, b, c and d is always 100 mole-%, and wherein the ratio of the totals of x and y on the one hand and of a to d on the other hand is substantially 1:1, to methods for the production thereof, new semiconductors, the use thereof for the production of luminescence diodes and laser diodes or also modulator and detector structures, which are monolithically integrated in integrated circuits on the basis of the Si or GaP technology.

1 . A monolithic integrated semiconductor structure comprising the following layer structure: 
 A) a carrier layer on the basis of doped or undoped Si or GaP,    B) as an option, a first current-conducting layer composed of doped Si, doped GaP or doped (AlGa) P,    C) as an option, a first adaptation layer, and    D) an optically active element comprising a semiconductor layer formed from a III/V semiconductor having the composition Ga x In y N a As b P c Sb d , wherein x=70-100 mole-%, y=0-30 mole-%, a=0.5-15 mole-%, b=67.5-99.5 mole-%, c=0-39.5 mole-% and d=0-15 mole-%, wherein the total of x and y is always 100 mole-%, wherein the total of a, b, c and d is always 100 mole-%, and wherein the ratio of the totals of x and y on the one hand and of a to d on the other hand is substantially 1:1.    
     
     
         2 . A semiconductor structure according to  claim 1 , comprising the below layer structure following to the layer D): 
 E) optionally a second adaptation layer, and    F) a second current-conducting layer composed of doped Si, doped GaP or doped (AlGa)P.    
     
     
         3 . A semiconductor structure according to  claim 1  or  2 , wherein the layer B) is p-doped or n-doped.  
     
     
         4 . A semiconductor structure according to one of  claims 1  to  3 , wherein y=1 to 30 mole-%.  
     
     
         5 . A semiconductor structure according to one of  claims 1  to  4 , wherein c=1 to 32.0 mole-%.  
     
     
         6 . A semiconductor structure according to one of  claims 1  to  5 , wherein the semiconductor is a direct semiconductor.  
     
     
         7 . A semiconductor structure according to one of  claims 2  to  6 , wherein the layer F) is p-doped, if the layer B) is n-doped, and wherein the layer F) is n-doped, if the layer B) is p-doped.  
     
     
         8 . A semiconductor structure according to one of  claims 1  to  7 , wherein the optically active element has a layer structure (D1-D2-D3) n , wherein the layer D2 is a quantum well layer of the said semiconductor, wherein the layers D1 and D3 are barrier layers, and wherein n=1-50, in particular 1-15.  
     
     
         9 . A semiconductor structure according to  claim 8 , wherein following one of the terminal layers D1 or D3, a barrier layer D4 is provided.  
     
     
         10 . A semiconductor structure according to  claim 8  or  9 , wherein the barrier layers are semiconductors having the composition Ga p In q N r —P s As t , wherein p=85-100 mole-%, q=0-15 mole-%, r=0-15 mole-%, s=60-100 mole-% and t=0-40 mole-%, wherein the total of p and q is always 100 mole-%, wherein the total of r, s and t is always 100 mole-%, wherein the ratio of the totals of p and q on the one hand and of r to t on the other hand is substantially 1:1, and wherein the barrier layer has a layer thickness of preferably 5-50 nm  
     
     
         11 . A semiconductor structure according to one of  claims 1  to  10 , wherein the first and/or the second adaptation layers are semiconductors having the composition Ga p In q N r P s As t , wherein p=90-100 mole-%, q=0-10 mole-%, r=0-10 mole-%, s=70-100 mole-% and t=0-30 mole-%, wherein the total of p and q is always 100 mole-%, wherein the total of r, s and t is always 100 mole-%, and wherein the ratio of the totals of p and q on the one hand and of r to t on the other hand is substantially 1:1, and wherein the adaptation layer has a layer thickness of preferably 50-500 nm.  
     
     
         12 . A semiconductor structure according to one of  claims 1  to  11 , wherein a current-conducting layer and/or barrier layer disposed between the carrier layer and the optically active element is at the same time an adaptation layer.  
     
     
         13 . A semiconductor structure according to one of  claims 1  to  12 , wherein underneath and/or above the optically active element, at least one optical waveguide layer is provided, which is optically coupled to the optically active element.  
     
     
         14 . A semiconductor structure according to one of  claims 1  to  13 , wherein between the layers A) and D) and/or outside the layer F), there is provided at least one periodic reflection structure.  
     
     
         15 . A semiconductor structure according to one of  claims 1  to  14 , wherein the optically active element has a fundamental emission wavelength in the range of 700-1,100 nm.  
     
     
         16 . A method for the production of a monolithic integrated semiconductor structure according to one of  claims 8  to  15 , 
 wherein on a carrier layer A on the basis of doped or undoped Si or GaP,    optionally a first current-conducting layer B consisting of doped Si, doped GaP or doped (AlGa)P is epitaxially grown,    optionally a first adaptation layer C is epitaxially grown, and    a multi-layer structure D, which forms an optically active element including a semiconductor layer comprising a semiconductor according to one of  claims 1  to  6 , is epitaxially grown.    
     
     
         17 . A method according to  claim 16 , wherein on the optically active element optionally a second adaptation layer E is epitaxially grown, and on the optically active element or the second adaptation layer a second current-conducting layer F consisting of doped Si or doped GaP or doped (AlGa)P is epitaxially grown.  
     
     
         18 . A method according to  claim 16  or  17 , wherein the layer B is p-doped or n-doped.  
     
     
         19 . A method according to  claim 18 , wherein the layer F) is p-doped, if the layer B) is n-doped, and wherein the layer F) is n-doped, if the layer B) is p-doped.  
     
     
         20 . A method according to one of  claims 16  to  19 , wherein the optical element is formed by epitaxial growth of layers D1, D2 and D3, wherein the order of the epitaxial steps is performed such that the layer structure is (D1-D2-D3) n , wherein the layer D2 is a quantum well layer of a semiconductor according to one of  claims 1  to  4 , wherein the layers D1 and D3 are barrier layers, and wherein n=1-50, in particular 1-15.  
     
     
         21 . A method according to  claim 20 , wherein following one of the terminal layers D1 or D3, a barrier layer D4 is epitaxially grown.  
     
     
         22 . A method according to  claim 20  or  21 , wherein the barrier layers are semiconductors having the composition Ga p In q N r P s As t , wherein p=85-100 mole-%, q=0-15 mole-%, r=0-15 mole-%, s=60-100 mole-% and t=0-40 mole-%, wherein the total of p and q is always 100 mole-%, wherein the total of r, s and t is always 100 mole-%, wherein the ratio of the totals of p and q on the one hand and of r to t on the other hand is substantially 1:1, and wherein the barrier layer has a layer thickness of preferably 5-50 nm.  
     
     
         23 . A method according to one of  claims 16  to  22 , wherein the first and/or second adaptation layers are semiconductors having the composition Ga p In q N r P s As t , wherein p=90-100 mole-%, q=0-10 mole-%, r=0-10 mole-%, s=70-100 mole-% and t=0-30 mole-%, wherein the total of p and q is always 100 mole-%, wherein the total of r, s and t is always 100 mole-%, wherein the ratio of the totals of p and q on the one hand and of r to t on the other hand is substantially 1:1, and wherein the adaptation layer has a layer thickness of preferably 50-500 nm.  
     
     
         24 . A method according to one of  claims 16  to  23 , wherein a current-conducting layer and/or barrier layer disposed between the carrier layer and the optically active element is at the same time an adaptation layer.  
     
     
         25 . A method according to one of  claims 16  to  24 , wherein underneath and/or above the optically active element, at least one optical waveguide layer is provided, which is optically coupled to the optically active element.  
     
     
         26 . A method according to one of  claims 16  to  25 , wherein between the layers A) and D) and/or outside the layer F), there is provided at least one periodic reflection structure.  
     
     
         27 . A method according to one of  claims 16  to  26 , wherein the optically active element has a fundamental emission wavelength in the range of 700-1,100 nm.  
     
     
         28 . A III/V semiconductor having the composition Ga x In y N a As b P c Sb d , wherein x=70-100 mole-%, y=0-30 mole-%, a=0.5-15 mole-%, b=67.5-99.5 mole-%, c=0-39.5 mole-% and d=0-15 mole-%, wherein the total of x and y is always 100 mole-%, wherein the total of a, b, c and d is always 100 mole-%, and wherein the ratio of the totals of x and y on the one hand and of a to d on the other hand is substantially 1:1.  
     
     
         29 . A III/V semiconductor according to  claim 28 , wherein y=1 to 30 mole-%.  
     
     
         30 . A III/V semiconductor according to  claim 28  or  29 , wherein c=1-32.0 mole-%.  
     
     
         31 . A III/V semiconductor according to one of  claims 28  to  30 , wherein the semiconductor is a direct semiconductor.  
     
     
         32 . A semiconductor layer comprising a semiconductor according to one of  claims 28  to  31 , wherein the layer thickness of the semiconductor layer is in the range from 1-50 nm, preferably 2-20 nm.  
     
     
         33 . The use of a semiconductor according to one of  claims 28  to  31  or of a semiconductor layer according to  claim 32  for the production of a luminescence diode, a VCSEL laser diode, a VECSEL laser diode, a modulator structure or a detector structure.  
     
     
         34 . A method for the production of a semiconductor layer according to  claim 33  comprising the following steps: 
 a substrate on the basis of doped or undoped Si or GaP is brought into a MOVPE apparatus,    optionally a surface of the substrate is provided in at least one epitaxial coating step first with respectively at least one adaptation layer, one barrier layer, one current-conducting layer, one waveguide layer and/or one reflection structure,    an inert carrier gas is loaded with educts in defined concentrations,    the loaded carrier gas is conducted over the surface of the substrate heated to a temperature in the range of 300° C. to 700° C. or on the surface of the uppermost layer on the substrate for a defined duration of exposure, and the total concentration of the educts and the duration of exposure are adjusted to each other such that the semiconductor layer is epitaxially formed with a given layer thickness on the surface of the substrate or on the surface of the uppermost layer on the substrate.    
     
     
         35 . A method according to  claim 34 , wherein the following educts are used: 
 C1-C5 trialkylgallium, in particular triethylgallium (Ga(C 2 H 5 ) 3 ) and/or trimethylgallium (Ga(CH 3 ) 3 ), as a Ga educt,    optionally C1-C5 trialkylindium, in particular trimethylindium (In(CH 3 ) 3 ), as an In educt,    ammonia (NH 3 ), mono(C1-C8)alkylhydrazine, in particular tertiarybutylhydrazine (t-(C 4 H 9 )—NH—NH 2 ), and/or 1,1-di(C1-C5)alkylhydrazine, in particular 1,1-dimethylhydrazine ((CH 3 ) 2 —N—NH 2 ), as an N educt,    arsine (AsH 3 ) and/or C1-C5 alkylarsine, in particular tertiarybutylarsine (t-(C 4 H 9 )—AsH 2 ), as an As educt,    phosphine (PH 3 ) and/or C1-C5 alkylphosphine, in particular tertiarybutylphosphine (t-(C 4 H 9 )—PH 2 ), as a P educt, and    optionally C1-C5 trialkylantimony, in particular trimethylantimony (Sb(C 2 H 5 ) 3 ) and/or triethylantimony (Sb(CH 3 ) 3 ), as an Sb educt,    wherein the C3-C5 alkyl groups may be linear or branched.    
     
     
         36 . A method according to  claim 35 , wherein the educts are employed in the following molar ratios: 
 As educt/group III educts 5-300,    P educt/group-III educts 0-500,    N educt/As educt 0.1-10,    optionally Sb educt/As educt 0-1,    wherein the surface temperature of the substrate is adjusted to the range from 500° C. to 630° C., wherein the total pressure of carrier gas and educts is adjusted to the range from 10 to 200 hPa, wherein the ratio of the total of the partial pressures of the educts to the partial pressure of the carrier gas is between 0.005 and 0.1, and wherein the deposition rate is 0.1 to 10 μm/h.    
     
     
         37 . A semiconductor layer obtainable with a method according to one of  claims 34  to  36 .  
     
     
         38 . An integrated monolithic semiconductor structure obtainable with a method according to one of  claims 16  to  26 .