Cassette for a load-lock

Abstract

A cassette for holding substrate in a load-lock comprising an outer casing having a front surface with multiple slots and two sidewalls having holes at the bottom section thereof is provided. Braces are set at the corner edges inside the outer casing and side plates are attached to the braces. Each slot has a set of side plates attached to the braces for holding a substrate. Obstruction pieces are also set inside the outer casing near the corresponding holes. Each obstruction pieces comprise a fixed part and an obstructing part. The fixed part attaches firmly to a bottom plate of the outer casing, and the obstructing part blocks the corresponding hole on the outer casing.

1 . A cassette, comprising: 
 an outer casing with a front surface having a plurality of slots and two side surfaces having a plurality of holes;    a plurality of braces positioned at corner edges inside the outer casing;    a plurality of side plates attached to the braces corresponding to each slot for supporting a substrate; and    a plurality of obstruction pieces positioned inside the outer casing to block the holes.    
   
   
       2 . The cassette of  claim 1 , wherein the cassette further comprises a plurality of horizontal screw sets, and each set of horizontal screws engages with a bottom plate of the outer casing near the holes.  
   
   
       3 . The cassette of  claim 1 , wherein each obstruction piece comprises a fixed part and an obstructing part, the fixed part is firmly attached to the outer casing and the obstructing part blocks the corresponding hole.  
   
   
       4 . The cassette of  claim 1 , wherein the obstruction pieces are L-shaped.  
   
   
       5 . The cassette of  claim 1 , wherein the braces are set on all four corners inside the outer casing and the side plates are attached to all four braces and correspond with each slot on the same horizontal plane.  
   
   
       6 . The cassette of  claim 5 , wherein the four side plates within the outer casing on the same horizontal plane corresponding to each slot support the corners of a substrate.