Substrate storage container and method for manufacturing the same

Abstract

A substrate storage container includes a container main body, first supporting parts and second supporting parts. The container main body includes a back wall and a pair of side walls in order to store a substrate between the side walls. The first supporting parts are opposingly disposed on each side wall in order to support a peripheral edge part of the substrate. The second supporting parts are opposingly disposed on each side wall in order to support the peripheral edge part of the substrate and positioned between the back wall and the first supporting parts. The first supporting parts and the second supporting parts are covered with a resin layer having a lower frictional property than that of the container main body.

1 . A substrate storage container comprising: 
 a container main body including a back wall and a pair of side walls in order to store a substrate between the side walls;    first supporting parts opposingly disposed on each side wall in order to support a peripheral edge part of the substrate; and    second supporting parts opposingly disposed on each side wall in order to support the peripheral edge part of the substrate and positioned between the back wall and the first supporting parts,    wherein the first supporting parts and the second supporting parts are covered with a resin layer having a lower frictional property than that of the container main body.    
   
   
       2 . The substrate storage container according to  claim 1 , further comprising: 
 an elastic retainer supporting the peripheral edge part of the substrate and disposed on the back wall of the container main body.    
   
   
       3 . The substrate storage container according to  claim 1 , 
 wherein the first supporting parts and second supporting parts are respectively protruded from the side walls of the container main body, and a clearance is formed between the first supporting part and the second supporting part on each side wall.    
   
   
       4 . The substrate storage container according to  claim 1 , 
 wherein the side wall of the container main body includes a contacting portion in order to contact with the peripheral edge part of the substrate,    wherein the contacting portion is positioned on an extension line of an intersecting center line perpendicular to a center line parallel to a direction of inserting and removing the substrate among the center lines passing on the substrate when the substrate is supported on the first supporting part and the second supporting part, and    wherein the contacting portion is covered with the resin layer.    
   
   
       5 . The substrate storage container according to  claim 1 , 
 wherein the side wall of the container main body includes a contacting portion in order to contact with the peripheral edge part of the substrate, and    wherein the contacting portion is covered with the resin layer.    
   
   
       6 . The substrate storage container according to  claim 1 , 
 wherein the container main body is made of a material including one of polycarbonate, polybutylene terephthalate, cycloolefin polymer, polyether imide, polyether ether ketone and alloy resin, and    wherein the resin layer is made of one of polybutylene terephthalate and polyether ether ketone.    
   
   
       7 . The substrate storage container according to  claim 1 , 
 wherein the resin layer includes a flange formed inside the side wall and having an outer portion near an outside surface of the side wall and an inner portion near an inside surface of the side wall, and    wherein the outer portion has a larger dimension than that of the inner portion.    
   
   
       8 . A method for manufacturing a substrate storage container including a container main body having a back wall and a pair of side walls in order to store a substrate between the side walls, first supporting parts opposingly disposed on each side wall in order to support a peripheral edge part of the substrate, and second supporting parts opposingly disposed on each side wall in order to support the peripheral edge part of the substrate and positioned between the back wall and the first supporting parts, said method comprising: 
 forming the first supporting parts and the second supporting parts on the side walls of the container main body;    covering the first supporting parts and the second supporting parts with a resin layer having a lower frictional property than that of the container main body; and    forming the container main body by inserting the side walls in a mold for forming the back wall of the container main body.    
   
   
       9 . The method for manufacturing a substrate storage container according to  claim 8 , further comprising: 
 covering a contacting portion with the resin layer for contacting with the peripheral edge part of the substrate on the side wall of the container main body.    
   
   
       10 . The method for manufacturing a substrate storage container according to  claim 8 , further comprising: 
 forming the side wall with a through hole having a shape corresponding to a flange having an outer portion near an outside surface of the side wall and an inner portion near an inside surface of the side wall wherein the outer portion of the flange has a larger dimension than that of the inner portion; and    filling the resin for forming the resin layers from the outsides of the side wall via the through hole.