Counter-electrode for electrodeposition and electroetching of resistive substrates

Abstract

Various counter-electrodes for electroplating, electrodeposition or anodizing of substrates are disclosed. According to certain embodiments, multi-segmented counter-electrodes are provided. According to additional embodiments, counter-electrodes having concave or convex top surfaces are provided. The disclosed counter-electrodes enable greater control over electrodeposition, electroetching and anodizing processes for resistive substrates, as well as more uniform plating and etching of resistive substrates. Methods for electroplating, electrodeposition or anodizing of resistive substrates using multi-segmented counter-electrodes are also provided.

1 . A multi-segmented counter-electrode for electrodeposition, electroetching or anodizing of resistive substrates, said multi-segmented counter-electrode comprising: 
 a series of vertically stacked counter-electrode segments comprising a center counter-electrode segment, at least one middle counter-electrode segment disposed beneath said center electrode, and an outer counter-electrode segment disposed beneath said at least one middle electrode.    
   
   
       2 . The multi-segmented counter-electrode of  claim 1 , wherein said center counter-electrode segment, said at least one middle counter-electrode segment and said outer counter-electrode segment are cylindrical in shape.  
   
   
       3 . The multi-segmented counter-electrode of  claim 2 , wherein said at least one middle counter-electrode segment has a diameter that is larger than a diameter of said center counter-electrode segment and said outer counter-electrode segment has a diameter that is larger than the diameter of said at least one middle counter-electrode segment.  
   
   
       4 . The multi-segmented counter-electrode of  claim 1 , wherein said at least one middle counter-electrode segment has a width that is larger than a width of said center counter-electrode segment and said outer counter-electrode segment has a width that is larger than the width of said at least one middle counter-electrode segment.  
   
   
       5 . The multi-segmented counter-electrode of  claim 1 , wherein said at least one middle counter-electrode segment comprises two or more middle counter-electrode segments.  
   
   
       6 . The multi-segmented counter-electrode of  claim 1 , wherein said center counter-electrode segment, said at least one middle counter-electrode segment, and said outer counter-electrode segment are constructed of a non-conductive material, and wherein an exposed portions of a top surface of each of said center counter-electrode segment, said at least one middle counter-electrode segment, and said outer counter-electrode segment is covered by a conductive layer.  
   
   
       7 . A system comprising the multi-segmented counter-electrode of  claim 1  and separate power supplies for each of said center counter-electrode segment, said at least one middle counter-electrode segment, and said outer counter-electrode segment.  
   
   
       8 . A multi-segmented counter-electrode for electrodeposition, electroetching or anodizing of resistive substrates, said multi-segmented counter-electrode comprising: 
 a center counter-electrode segment;    at least one middle counter-electrode segment concentric with said center counter-electrode segment;    an outer counter-electrode segment concentric with said center counter-electrode segment and said at least one middle counter-electrode segment; and    a height-adjusting means arranged to individually adjust a height of at least one of the following: said center counter-electrode segment, said at least one middle counter-electrode segment and said outer counter-electrode segment.    
   
   
       9 . The multi-segmented counter-electrode of  claim 8 , wherein said height-adjusting means comprises at least one shim disposed beneath at least one of the following: said center counter-electrode segment, said at least one middle counter-electrode segment, and said outer counter-electrode segment.  
   
   
       10 . The multi-segmented counter-electrode of  claim 8 , wherein said height-adjusting means comprises at least one remotely-controlled element disposed beneath at least one of the following: said center counter-electrode segment, said at least one middle counter-electrode segment, and said outer counter-electrode segment.  
   
   
       11 . The multi-segmented counter-electrode of  claim 10 , wherein said remotely controlled element comprises a pneumatic support.  
   
   
       12 . The multi-segmented counter-electrode of  claim 11 , wherein the pneumatic support is connected to an air tube positioned along internal edges of an electrochemical cell.  
   
   
       13 . The multi-segmented counter-electrode of  claim 8 , wherein adjacent counter-electrode segments among said center counter-electrode segment, said at least one middle counter-electrode segment, and said outer counter-electrode segment contact each other at low-friction vertical interfaces.  
   
   
       14 . The multi-segmented counter-electrode of  claim 8 , wherein adjacent counter-electrode segments among said center counter-electrode segment, said at least one middle counter-electrode segment, and said outer counter-electrode segment are separated by a gap.  
   
   
       15 . The multi-segmented counter-electrode of  claim 8 , wherein said center counter-electrode segment is cylindrical in shape, and wherein said at least one middle counter-electrode segment and said outer counter-electrode segment are annular in shape.  
   
   
       16 . The multi-segmented counter-electrode of  claim 15 , wherein said at least one middle counter-electrode segment has an outer diameter that is larger than an outer diameter of said center counter-electrode segment and said outer counter-electrode segment has a diameter that is larger than the outer diameter of said at least one middle counter-electrode segment.  
   
   
       17 . The multi-segmented counter-electrode of  claim 8 , wherein said center counter-electrode segment, said at least one middle counter-electrode segment, and said outer counter-electrode segment are constructed of a non-conductive material, and wherein an exposed portion of a top surface of each of said center counter-electrode segment, said at least one middle counter-electrode segment, and said outer counter-electrode segment is covered by a conductive layer.  
   
   
       18 . The multi-segmented counter-electrode of  claim 8 , wherein said at least one middle counter-electrode segment comprises two or more middle counter-electrode segments.  
   
   
       19 . A system comprising the multi-segmented counter-electrode of  claim 8  and separate power supplies for each of said center counter-electrode segment, said at least one middle counter-electrode segment, and said outer counter-electrode segment.  
   
   
       20 . A counter-electrode for electrodeposition, electroetching or anodizing of resistive substrates, wherein said counter-electrode comprises a concave or convex top surface.  
   
   
       21 . A method for electroplating, electrodeposition or anodizing of resistive substrates, comprising: 
 providing a multi-segmented counter-electrode comprising a series of vertically stacked counter-electrode segments; and    selectively powering at least one of the counter-electrode segments.    
   
   
       22 . The method of  claim 21 , wherein selectively powering at least one of the counter-electrode segments comprises powering at least two counter-electrode segments at equal current density.  
   
   
       23 . The method of  claim 21 , wherein selectively powering at least one of the counter-electrode segments comprises powering at least two counter-electrode segments at different current densities.  
   
   
       24 . A method for electroplating, electrodeposition or anodizing of resistive substrates, comprising: 
 providing a multi-segmented counter-electrode comprising a series of concentric counter-electrode segments; and    independently varying a height of at least one of the counter-electrode segments.    
   
   
       25 . The method of  claim 24 , comprising selectively powering at least one of the counter-electrode segments.  
   
   
       26 . The method of  claim 25 , wherein selectively powering at least one of the counter-electrode segments comprises powering at least two counter-electrode segments at equal current densities.  
   
   
       27 . The method of  claim 25 , wherein selectively powering at least one of the counter-electrode segments comprises powering at least two counter-electrode segments at different current densities.  
   
   
       28 . The method of  claim 24 , wherein the counter-electrode comprises at least one shim for independently varying the height of at least one of the counter-electrode segments.  
   
   
       29 . The method of  claim 24 , wherein the counter-electrode comprises at least one remotely controlled element for independently varying the height of at least one of the selected counter-electrode segments.  
   
   
       30 . The method of  claim 24 , wherein the at least one remotely controlled element comprises a pneumatic support.