Conductive ball mounting apparatus

Abstract

A conductive ball mounting apparatus for mounting conductive balls by providing an array mask having through holes, into which conductive balls are to enter, above a mounting target placed on a stage, by arranging a ball reservoir having an opening for reserving a plurality of conductive balls, in the bottom, by moving the ball reservoir along the array mask, by dropping the conductive balls into the individual through holes of the array mask, adopts the following means. Firstly, the conductive ball mounting apparatus comprises moving means for moving the array mask and the stage relative to each other in horizontal directions. Secondly, the positions of the conductive balls in the through holes are arranged by finely moving at least one of the array mask and the stage relative to each other in the horizontal directions after the balls were dropped.

1 . A conductive ball mounting apparatus for mounting a conductive ball comprising: 
 an array mask having a through hole, into which a conductive ball is to enter, the array mask being provided above a mounting target placed on a stage;    a ball reservoir having an opening for reserving a plurality of conductive balls in the bottom thereof, the ball reservoir moving along the array mask and dropping the conductive ball into the each through hole of the array mask; and    moving means for moving at least one of the array mask and the stage relative to each other in a horizontal direction,    wherein a position of the conductive ball in the through hole is arranged by moving at least one of the array mask and the stage relative to each other in a horizontal direction after the ball was dropped.    
   
   
       2 . The conductive ball mounting apparatus according to  claim 1 , wherein the moving at least one of the array mask and the stage comprises a straight movement in a horizontal direction.  
   
   
       3 . The conductive ball mounting apparatus according to  claim 1 , wherein the moving at least one of the array mask and the stage further comprises a sequential movement in a direction perpendicular to the horizontal direction.  
   
   
       4 . The conductive ball mounting apparatus according to  claim 1 , wherein a distance of the moving at least one of the array mask and the stage is at least a difference between a diameter of the conductive ball and a diameter of the through hole.  
   
   
       5 . The conductive ball mounting apparatus according to  claim 4 , wherein the moving at least one of the array mask and the stage further comprises a movement in another horizontal direction opposite to the horizontal direction by at least one half of a difference between the diameter of the conductive ball and the diameter of the through hole.  
   
   
       6 . The conductive ball mounting apparatus according to  claim 1 , wherein the moving at least one of the array mask and the stage comprises a movement to turn in a horizontal plane.  
   
   
       7 . The conductive ball mounting apparatus according to  claim 1 , wherein, after the moving at least one of the array mask and the stage, the at least one of the array mask and the stage is so moved that the conductive ball leaves the inner wall of the through hole.