Film forming method, film forming apparatus, method of manufacturing device, and apparatus for manufacturing device

Abstract

The invention provides a film forming method that improves throughput in a preliminary discharge. The film forming method according to the present invention can include a preliminary discharge step of preliminarily discharging liquid droplets from a head and a liquid droplet discharge step of relatively moving the head and the work to discharge the liquid droplets onto the surface of the work from the head. The preliminary discharge of the liquid droplets is carried out while the head and the work are moved relative to each other.

1 . A film forming apparatus for forming a film by relatively moving heads and a work to discharge liquid droplets onto the surface of the work from the heads, the apparatus comprising: 
 a control unit that preliminarily discharges liquid droplets from the heads while the heads and/or the work are moved.    
   
   
       2 . The film forming apparatus according to  claim 1 , the control unit preliminarily discharging the liquid droplets from the heads during acceleration of the heads and/or work up to a predetermined relative speed.  
   
   
       3 . The film forming apparatus according to  claim 1 , a liquid droplet reception area being partially formed by the work and receives the preliminary liquid droplets.  
   
   
       4 . The film forming apparatus according to  claim 1 , the control unit vibrating liquid within the heads to an extent that the liquid is not discharged from the heads, after discharging the liquid droplets onto a surface of the work.  
   
   
       5 . An apparatus for manufacturing a device, in which a film body is formed by discharging liquid droplets onto a surface of a work from heads, the film body being formed on the work using the film forming apparatus according to  claim 1.