Pod cover removing-installing apparatus

Abstract

A cover can be unlocked even if a rectangular engaging groove runs out of alignment to some extent during previous steps or during a carrying operation from a previous step. A T-shaped key 14 c consists of a head 141 and a neck 142 functioning as a rotation axis for the head 141. The head 141 has four inclined sides 143 along the both longitudinal sides tapering from the center toward the end. The T-shaped key 14 c also has chamfers 144 formed on the topside of each inclined sides 143.

1 . (canceled)  
   
   
       2 . A pod cover removing-installing apparatus to remove and install a cover for an opening of a pod, the inside of which is kept extremely clean, by causing the cover to engage a door of an opening of a highly clean room, while maintaining high cleanliness of the pod and the room by closely attaching the circumference of the two openings, the cover being provided with a lock mechanism to lock and unlock the opening of the pod by rotation of a rectangular key groove provided inside the rectangular key hole, wherein the door is provided with a locking member having a T-shaped key, the head of which engages the rectangular key groove via the rectangular key hole of the cover, and driving to lock or unlock the locking mechanism by the rotation of the T-shaped key, the T-shaped key is provided with an engagement allowance section for allowing the engagement of the head with the rectangular key groove according to deviation of the rotation angle of the rectangular key groove of the rock mechanism, and the engagement allowance section consists of inclined sides extending along the both longitudinal sides of the head and tapering from the center toward the end.  
   
   
       3 . The pod cover removing-installing apparatus according to  claim 2 , wherein the engagement allowance section consists of chamfers formed on the top of the inclined sides.  
   
   
       4 . (canceled)  
   
   
       5 . The pod cover removing-installing apparatus according to  claim 2 , provided with a drive control means for controlling the locking member to perform a locking motion after the T-shaped key has been rotated the number of times, each time a prescribed angle, until the head of the T-shaped key engages the rectangular key groove.  
   
   
       6 . The pod cover removing-installing apparatus according to  claim 2 , wherein the T-shaped key is provided with a rotation allowable section on the head to allow rotation of the head according to deformation of the periphery of the rectangular key hole of the cover.  
   
   
       7 . The pod cover removing-installing apparatus according to  claim 6 , wherein the rotation allowance section consists of chamfers formed on the jaw side of the inclined sides.