Electronic emitters with dopant gradient

Abstract

Electron emitters and a method of fabricating emitters are disclosed, having a concentration gradient of impurities, such that the highest concentration of impurities is at the apex of the emitters and decreases toward the base of the emitters. The method comprises the steps of doping, patterning, etching, and oxidizing the substrate, thereby forming the emitters having impurity gradients.

1 . An in-process semiconductor device, comprising: 
 a surface;    a pillar extending from said surface and having an etchability that decreases toward said surface; and    a dopant above said surface, in said pillar, and having a concentration commensurate with said etchability.    
   
   
       2 . An in-process field emission device, comprising: 
 a substrate; and    a stalk extending from said substrate, further comprising: 
 an emitter having: 
 an apex, and  
 a base, and  
 
 an oxide around said emitter, wherein said oxide has a plurality of thicknesses, including: 
 a first thickness at said base, and  
 a greater second thickness at said apex.  
 
   
   
   
       3 . The in-process field emission device in  claim 2 , wherein said oxide has a third thickness above said apex greater than said second thickness.  
   
   
       4 . The in-process field emission device in  claim 3 , wherein said oxide covers said substrate.  
   
   
       5 . The in-process field emission device in  claim 4 , further comprising a dopant exclusively within said stalk, and having a plurality of concentrations that are generally directly proportional to said plurality of said thicknesses of said oxide.