US2006212253A1PendingUtilityA1

Intelligent measurement modular semiconductor parametric test system

48
Assignee: MICRON TECHNOLOGY INCPriority: May 23, 2001Filed: May 10, 2006Published: Sep 21, 2006
Est. expiryMay 23, 2021(expired)· nominal 20-yr term from priority
Inventors:Sergey VelichkoMichael DoroughRobert Blunn
H10P 72/0612G01R 1/025G01R 31/2831
48
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Claims

Abstract

An intelligent measurement modular semiconductor parametric test system comprises an engine control module. The engine control module is operable to communicate with a user via a user interface, and is further operable to communicate with and to control the state of at least one other module in the semiconductor parametric test system including pluggable modules. The engine control module is further operable to control test flow via a test monitor module based on data and control events received from an intelligent measurement module. Other modules in various embodiments comprise prober monitor modules.

Claims

exact text as granted — not AI-modified
1 . A modular semiconductor parametric test system, comprising: 
 a software engine control module, operable to communicate with a user via a user interface and further operable to communicate with and to control the state of at least one other software module in the semiconductor parametric test system, wherein the at least one other software module comprises at least one pluggable module.    
     
     
         2 . The modular semiconductor parametric test system of  claim 1 , wherein the at least one pluggable module is a measurement module.  
     
     
         3 . The modular semiconductor parametric test system of  claim 1 , wherein the at least one pluggable module comprises a test monitor module.  
     
     
         4 . The modular semiconductor parametric test system of  claim 1 , wherein the at least one pluggable module comprises a prober monitor module.  
     
     
         5 . The modular semiconductor parametric test system of  claim 1 , wherein the engine control module is further operable to receive user commands, the user commands comprising start test, pause test, and abort test.  
     
     
         6 . A modular semiconductor parametric test system, comprising: 
 an engine control software module, operable to communicate with a user via a user interface and further operable to communicate with and to control the state of at least one other software module in the semiconductor parametric test system, wherein the at least one other software module comprises a pluggable measurement module.    
     
     
         7 . The modular semiconductor parametric test system of  claim 6 , wherein the measurement module is operable to store test data.  
     
     
         8 . The modular semiconductor parametric test system of  claim 6 , wherein the measurement module is operable to store test data attributes.  
     
     
         9 . The modular semiconductor parametric test system of  claim 6 , wherein the measurement module contains data attributes indicating bad measurement data.  
     
     
         10 . The modular semiconductor parametric test system of  claim 6 , wherein the measurement module contains augmented test data, the augmented test data comprising data derived from measured test data.  
     
     
         11 . The modular semiconductor parametric test system of  claim 6 , wherein the measurement module is operable to communicate events that govern the engine control module and test flow.  
     
     
         12 . A modular semiconductor parametric test system, comprising: 
 an engine control software module, operable to communicate with a user via a user interface and further operable to communicate with and to control the state of at least one other software module in the semiconductor parametric test system, wherein the at least one other software module comprises a test monitor module.    
     
     
         13 . The modular semiconductor parametric test system of  claim 12 , wherein the test monitor module provides an interface between the engine control module and a measurement module.  
     
     
         14 . The modular semiconductor parametric test system of  claim 12 , wherein the test monitor module is operable to load and execute a test.  
     
     
         15 . The modular semiconductor parametric test system of  claim 12 , wherein the engine control module is operable to control test flow via the test monitor module based on data and control events received from a measurement module.  
     
     
         16 . The modular semiconductor parametric test system of  claim 12 , wherein the test monitor module provides event data to the engine control module.  
     
     
         17 . A modular semiconductor parametric test system, comprising: 
 an engine control software module, operable to communicate with a user via a user interface and further operable to communicate with and to control the state of at least one other software module in the semiconductor parametric test system, wherein the at least one other software module comprises a pluggable prober monitor module.    
     
     
         18 . The modular semiconductor parametric test system of  claim 17 , wherein the prober monitor module is operable to provide prober event data to the engine control module.  
     
     
         19 . A modular semiconductor parametric test system, comprising: 
 an engine control software module, operable to communicate with a user via a user interface and further operable to communicate with and to control the state of at least one other software module in the semiconductor parametric test system, wherein the at least one other software module comprises at least one pluggable module;    a test monitor module, operable under the control of the engine control module to load and control the state of a semiconductor parametric test;    a prober monitor module, operable under control of the engine control module to control operation of a prober; and    at least one pluggable expansion module, the expansion module operable under control of the engine control module to provide further functionality under the control of the engine control module.    
     
     
         20 . A method of controlling a modular semiconductor parametric test system, comprising: 
 communicating with a user via user interface linked to an engine control software module;    communicating with at least one other software module in the semiconductor parametric test system via the engine control module, where the at least one other software module is a pluggable module; and    controlling the state of the at least one other pluggable module in the semiconductor parametric test system via the engine control software module.    
     
     
         21 . The method of controlling a modular semiconductor parametric test system of  claim 20 , wherein the at least one pluggable module is a measurement module.  
     
     
         22 . The method of controlling a modular semiconductor parametric test system of  claim 20 , wherein the at least one pluggable module comprises a test monitor module.  
     
     
         23 . The method of controlling a modular semiconductor parametric test system of  claim 20 , wherein the at least one pluggable module comprises a prober monitor module.  
     
     
         24 . The method of controlling a modular semiconductor parametric test system of  claim 20 , wherein the engine control module is further operable to receive user commands, the user commands comprising start test, pause test, and abort test.  
     
     
         25 . A method of controlling a modular semiconductor parametric test system, comprising: 
 communicating with a user via user interface linked to an engine control software module;    communicating with a software pluggable measurement module in the semiconductor parametric test system via the engine control module; and    controlling the state of the software pluggable measurement module in the semiconductor parametric test system via the engine control module.    
     
     
         26 . The method of controlling a modular semiconductor parametric test system of  claim 25 , wherein the pluggable measurement module is operable to store test data.  
     
     
         27 . The method of controlling a modular semiconductor parametric test system of  claim 25 , wherein the pluggable measurement module is operable to store test data attributes.  
     
     
         28 . The method of controlling a modular semiconductor parametric test system of  claim 25 , wherein the pluggable measurement module contains data attributes indicating bad measurement data.  
     
     
         29 . The method of controlling a modular semiconductor parametric test system of  claim 25 , wherein the pluggable measurement module contains augmented test data, the augmented test data comprising data derived from measured test data.  
     
     
         30 . The method of controlling a modular semiconductor parametric test system of  claim 25 , wherein the pluggable measurement module is operable to communicate events that govern the engine control module and test flow.  
     
     
         31 . A method of controlling a modular semiconductor parametric test system, comprising: 
 communicating with a user via a user interface linked to an engine control software module;    communicating with a pluggable test monitor software module in the semiconductor parametric test system via the engine control module; and    controlling the state of the pluggable test monitor software module in the semiconductor parametric test system via the engine control software module.    
     
     
         32 . The method of controlling a modular semiconductor parametric test system of  claim 31 , wherein the pluggable test monitor module provides an interface between the engine control module and a measurement module.  
     
     
         33 . The method of controlling a modular semiconductor parametric test system of  claim 31 , wherein the pluggable test monitor module is operable to load and execute a test.  
     
     
         34 . The method of controlling a modular semiconductor parametric test system of  claim 31 , wherein the engine control module is operable to control test flow via the pluggable test monitor module based on data and control events received from a measurement module.  
     
     
         35 . The method of controlling a modular semiconductor parametric test system of  claim 32 , wherein the measurement module is operable to communicate events that govern the engine control module and test flow.  
     
     
         36 . The method of controlling a modular semiconductor parametric test system of  claim 31 , wherein the test monitor module provides event data to the engine control module.  
     
     
         37 . A method of controlling a modular semiconductor parametric test system, comprising: 
 communicating with a user via a user interface linked to an engine control software module;    communicating with a software pluggable prober monitor module in the semiconductor parametric test system via the engine control software module; and    controlling the state of the software pluggable prober monitor module in the semiconductor parametric test system via the engine control software module.    
     
     
         38 . The method of controlling a modular semiconductor parametric test system of  claim 37 , wherein the pluggable prober monitor module is operable to provide prober event data to the engine control module.  
     
     
         39 . A method of controlling a modular semiconductor parametric test system, comprising: 
 communicating with a user via user interface linked to a software engine control module;    communicating with a prober monitor module, a test monitor module, and at least one pluggable expansion software module in the semiconductor parametric test system via the software engine control module; and    controlling the state of the prober monitor module, the test monitor module, and the at least one pluggable expansion module via the software engine control module.    
     
     
         40 . A machine-readable medium with instructions stored thereon, the instructions when executed operable to cause a modular semiconductor parametric test system to perform functions comprising: 
 communicating with a user via user interface linked to a software engine control module;    communicating with at least one other software module in the semiconductor parametric test system via the engine control module, where the at least one other module is a pluggable module; and    controlling the state of the at least one other pluggable module in the semiconductor parametric test system via the engine control module.    
     
     
         41 . The machine-readable medium of  claim 40 , wherein the at least one pluggable module is a measurement module.  
     
     
         42 . The machine-readable medium of  claim 40 , wherein the at least one pluggable module comprises a test monitor module.  
     
     
         43 . The machine-readable medium of  claim 40 , wherein the at least one pluggable module comprises a prober monitor module.  
     
     
         44 . The machine-readable medium of  claim 40 , wherein the engine control module is further operable to receive user commands, the user commands comprising start test, pause test, and abort test.  
     
     
         45 . A machine-readable medium with instructions stored thereon, the instructions when executed operable to cause a modular semiconductor parametric test system to perform functions comprising: 
 communicating with a user via user interface linked to a software engine control module;    communicating with a software pluggable measurement module in the semiconductor parametric test system via the engine control module; and    controlling the state of the pluggable measurement module in the semiconductor parametric test system via the engine control module.    
     
     
         46 . The machine-readable medium of  claim 45 , wherein the pluggable measurement module is operable to store test data.  
     
     
         47 . The machine-readable medium of  claim 45 , wherein the pluggable measurement module is operable to store test data attributes.  
     
     
         48 . The machine-readable medium of  claim 45 , wherein the pluggable measurement module contains data attributes indicating bad measurement data.  
     
     
         49 . The machine-readable medium of  claim 45 , wherein the pluggable measurement module contains augmented test data, the augmented test data comprising data derived from measured test data.  
     
     
         50 . The machine-readable medium of  claim 45 , wherein the pluggable measurement module is operable to communicate events that govern the engine control module and test flow.  
     
     
         51 . A machine-readable medium with instructions thereon, the instructions when executed operable to cause a modular semiconductor parametric test system to perform functions comprising: 
 communicating with a user via a user interface linked to a software engine control module;    communicating with a test monitor software module in the semiconductor parametric test system via the engine control module; and    controlling the state of the test monitor module in the semiconductor parametric test system via the engine control module.    
     
     
         52 . The machine-readable medium of  claim 51 , wherein the test monitor module provides an interface between the engine control and a measurement module.  
     
     
         53 . The machine-readable medium of  claim 51 , wherein the test monitor module is operable to load and execute a test.  
     
     
         54 . The machine-readable medium of  claim 51 , wherein the engine control module is operable to control test flow via the test monitor module based on data and control events received from a measurement module.  
     
     
         55 . The method of controlling a modular semiconductor parametric test system of  claim 51 , wherein the test monitor module provides event data to the engine control module.  
     
     
         56 . A machine-readable medium with instructions stored thereon, the instructions when executed operable to cause a modular semiconductor parametric test system to perform functions comprising: 
 communicating with a user via user interface linked to an engine control software module;    communicating with a pluggable prober monitor software module in the semiconductor parametric test system via the engine control module; and    controlling the state of the pluggable prober monitor module in the semiconductor parametric test system via the engine control module.    
     
     
         57 . The method of controlling a modular semiconductor parametric test system of  claim 56 , wherein the pluggable prober monitor module is operable to provide prober event data to the engine control module.  
     
     
         58 . A machine-readable medium with instructions stored thereon, the instructions when executed operable to cause a modular semiconductor parametric test system to perform functions comprising: 
 communicating with a user via user interface linked to an engine control software module;    communicating with a prober monitor module, a test monitor module, and at least one pluggable expansion software module in the semiconductor parametric test system via the engine control module; and    controlling the state of the prober monitor module, the test monitor module, and the at least one expansion module via the engine control module.

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