Systems for depositing material onto workpieces in reaction chambers and methods for removing byproducts from reaction chambers

Abstract

Systems for depositing material onto workpieces in reaction chambers and methods for removing byproducts from reaction chambers are disclosed herein. In one embodiment, the system includes a gas phase reaction chamber, a first exhaust line coupled to the reaction chamber, first and second traps each in fluid communication with the first exhaust line, and a vacuum pump coupled to the first exhaust line to remove gases from the reaction chamber. The first and second traps are operable independently to individually and/or jointly collect byproducts from the reaction chamber. It is emphasized that this Abstract is provided to comply with the rules requiring an abstract. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.

1 - 23 . (canceled)  
   
   
       24 . A method for removing byproducts from a reaction chamber through a first mainline, the first mainline being coupled to the reaction chamber and having first and second branchlines downstream from the reaction chamber, the method comprising: 
 exhausting byproducts from the reaction chamber through the first mainline;    collecting byproducts in a first trap in the first branchline of the first mainline; and    collecting byproducts in a second trap in the second branchline of the first mainline.    
   
   
       25 . The method of  claim 24 , further comprising dynamically controlling the flow of byproducts into the second branchline to maintain a pressure differential in the first mainline within a desired range.  
   
   
       26 . The method of  claim 24 , further comprising dynamically controlling the flow of byproducts into the second branchline to maintain a generally consistent throughput in the first mainline.  
   
   
       27 . The method of  claim 24 , further comprising: 
 monitoring the difference between the pressure in the first mainline upstream from the first trap and the pressure in the first mainline downstream from the first trap; and    regulating a throttling valve in the second branchline in response to the monitored pressure differential in the first mainline to flow byproducts into the second branchline to maintain the pressure differential in the first mainline within a desired range.    
   
   
       28 . The method of  claim 24 , further comprising: 
 closing a first valve in the first branchline upstream from the first trap and a second valve in the first branchline downstream from the first trap; and    servicing and/or replacing the first trap while collecting byproducts in the second trap.    
   
   
       29 . The method of  claim 24  wherein the first mainline further comprises a third branchline and a fourth branchline each downstream from the first and second branchlines, and wherein the method further comprises: 
 drawing byproducts from the reaction chamber through the first mainline with a first vacuum pump coupled to the third branchline of the first mainline; and    drawing byproducts from the reaction chamber through the first mainline with a second vacuum pump coupled to the fourth branchline of the first mainline.    
   
   
       30 . A method for removing byproducts from a reaction chamber through a first mainline, the first mainline having first and second branchlines downstream from the reaction chamber, the method comprising: 
 exhausting byproducts from the reaction chamber through the first mainline; and    dynamically controlling the flow of byproducts into the second branchline of the first mainline to maintain a pressure differential in the first mainline within a desired range.    
   
   
       31 . The method of  claim 30 , further comprising: 
 collecting byproducts in a first trap in the first branchline of the first mainline; and    collecting byproducts in a second trap in the second branchline of the first mainline.    
   
   
       32 . The method of  claim 30 , further comprising: 
 monitoring the difference between the pressure in the first mainline upstream from a first trap and the pressure in the first mainline downstream from the first trap, the first trap being disposed in the first branchline;    wherein dynamically controlling the flow of byproducts comprises regulating a throttling valve in the second branchline in response to the monitored pressure differential in the first mainline to maintain the pressure differential in the first mainline within the desired range.    
   
   
       33 . The method of  claim 30  wherein the first mainline further comprises a third branchline and a fourth branchline each downstream from the first and second branchlines, and wherein the method further comprises: 
 drawing byproducts from the reaction chamber through the first mainline with a first vacuum pump coupled to the third branchline of the first mainline; and    drawing byproducts from the reaction chamber through the first mainline with a second vacuum pump coupled to the fourth branchline of the first mainline.    
   
   
       34 . A method for removing byproducts from a reaction chamber, the method comprising: 
 exhausting byproducts from the reaction chamber through a first mainline;    collecting byproducts in a first trap in a first branchline of the first mainline;    monitoring the difference between the pressure in the first mainline upstream from the first trap and the pressure in the first mainline downstream from the first trap; and    regulating a throttling valve in a second branchline of the first mainline in response to the monitored pressure differential in the first mainline to flow byproducts into the second branchline to maintain the pressure differential in the first mainline within a desired range.    
   
   
       35 . The method of  claim 34 , further comprising collecting byproducts in a second trap in the second branchline.  
   
   
       36 . The method of  claim 34  wherein the throttling valve comprises a first valve, and wherein the method further comprises: 
 closing a second valve in the first branchline upstream from the first trap and a third valve in the first branchline downstream from the first trap after regulating the first valve;    collecting byproducts in a second trap in the second branchline; and    servicing and/or replacing the first trap while collecting byproducts in the second trap.    
   
   
       37 . The method of  claim 34  wherein the first mainline further comprises a third branchline and a fourth branchline each downstream from the first and second branchlines, and wherein the method further comprises: 
 drawing byproducts from the reaction chamber through the first mainline with a first vacuum pump coupled to the third branchline of the first mainline; and    drawing byproducts from the reaction chamber through the first mainline with a second vacuum pump coupled to the fourth branchline of the first mainline.    
   
   
       38 . A method for removing byproducts from a reaction chamber, the method comprising: 
 removing byproducts from the reaction chamber through a first mainline;    collecting byproducts in a first trap in a first branchline of the first mainline;    closing a first valve in the first branchline upstream from the first trap and a second valve in the first branchline downstream from the first trap;    servicing and/or replacing the first trap; and    collecting byproducts in a second trap in a second branchline of the first mainline while the first and second valves are closed.    
   
   
       39 . The method of  claim 38  wherein the first mainline further comprises a third branchline and a fourth branchline each downstream from the first and second branchlines, and wherein the method further comprises: 
 drawing byproducts from the reaction chamber through the first mainline with a first vacuum pump coupled to the third branchline of the first mainline; and    drawing byproducts from the reaction chamber through the first mainline with a second vacuum pump coupled to the fourth branchline of the first mainline.    
   
   
       40 . A method for removing byproducts from a reaction chamber, the method comprising: 
 drawing byproducts from the reaction chamber through a first mainline with a first vacuum pump coupled to a first branchline of the first mainline; and    drawing byproducts from the reaction chamber through the first mainline with a second vacuum pump coupled to a second branchline of the first mainline.    
   
   
       41 . The method of  claim 40 , further comprising collecting byproducts in a trap in the first mainline.  
   
   
       42 . The method of  claim 40  wherein the first mainline further comprises a third branchline and a fourth branchline each upstream from the first and second branchlines, and wherein the method further comprises: 
 collecting byproducts in a first trap in the third branchline of the first mainline; and    collecting byproducts in a second trap in the fourth branchline of the first mainline.    
   
   
       43 . The method of  claim 40 , further comprising dynamically controlling a throttling valve in the second branchline to maintain a generally consistent throughput in the first mainline.  
   
   
       44 . The method of  claim 40 , further comprising dynamically controlling a throttling valve in the second branchline to maintain a generally consistent vacuum conductance in the first mainline.  
   
   
       45 . The method of  claim 40 , further comprising: 
 monitoring a pressure in the first mainline; and    regulating a throttling valve in the second branchline in response to the monitored pressure to maintain a generally consistent pressure in the first mainline.