Automated throughput control system and method of operating the same

Abstract

An automated throughput control system and method is provided. By gathering tool specific information of a plurality of process tools on entity level, appropriate throughput related performance characteristics may be calculated with high statistical significance during moderately short time intervals. Moreover, the performance characteristics obtained from tool information may be compared to reference data, for instance provided by dynamic simulation calculations, to identify high, as well as low, performing equipment on the basis of standard process control mechanisms.

1 . A system, comprising: 
 an interface configured to receive process messages form a plurality of process tools; and    a throughput control unit connected to said interface and configured to automatically determine a throughput related performance characteristic for each of said plurality of process tools.    
   
   
       2 . The system of  claim 1 , wherein said throughput control unit is further configured to identify a process tool of significance having a determined performance characteristic outside a specified performance range.  
   
   
       3 . The system of  claim 1 , wherein said process messages comprise tool specific information relating to at least one of a chamber processing time, a chamber idle time, a substrate handler process time and a substrate handler idle time of at least one of said plurality of process tools.  
   
   
       4 . The system of  claim 1 , wherein said interface is further configured to receive process data from a manufacturing execution system, said process data being related to at least one of said plurality of process tools.  
   
   
       5 . The system of  claim 2 , wherein said throughput control unit comprises a statistical process control section configured to identify said process tool of significance on the basis of said determined performance characteristics.  
   
   
       6 . The system of  claim 5 , wherein said statistical process control section has implemented therein a control chart specifying a valid range of at least one of the performance characteristics.  
   
   
       7 . The system of  claim 6 , wherein said control chart is configured to define an out of control situation for said at least one performance characteristic.  
   
   
       8 . The system of  claim 7 , wherein said at least one performance characteristic represents a process time of at least one entity of one or more of said plurality of process tools.  
   
   
       9 . The system of  claim 8 , wherein said at least one performance characteristic represents an overall processing time of a substrate processed by at least one of said plurality of process tools.  
   
   
       10 . The system of  claim 5 , further comprising a tool simulator section configured to provide simulation results representing an ideal behavior of at least one entity of one or more of said plurality of process tools for a specified tool configuration.  
   
   
       11 . The system of  claim 10 , wherein said statistical process control section is configured to receive said simulation results and to identify said process tool of significance on the basis of said simulation results.  
   
   
       12 . A method, comprising: 
 receiving process messages from a plurality of process tools used in a manufacturing process line by a throughput control unit; and    determining a throughput related performance characteristic for each of said plurality of process tools on the basis of said process messages.    
   
   
       13 . The method of  claim 12 , wherein said tool messages comprise tool specific information relating to at least one of a chamber processing time, a chamber idle time, a substrate handler process time and a substrate handler idle time of at least one of said plurality of process tools.  
   
   
       14 . The method of  claim 12 , further comprising receiving process data from a manufacturing execution system, said process date being related to at least one of said plurality of process tools.  
   
   
       15 . The method of  claim 14 , wherein data on all tool activities at least for a predefined manufacturing interval are provided to said throughput control unit to enhance a statistical significance of said performance characteristics.  
   
   
       16 . The method of  claim 12 , further comprising performing control of said plurality of process tools on the basis of said performance characteristics.  
   
   
       17 . The method of  claim 16 , wherein performing control of said process tools comprises controlling said process tools on the basis of a statistical process control mechanism.  
   
   
       18 . The method of  claim 17 , wherein controlling on the basis of said statistical process control mechanism comprises implementing control charts specifying a valid range of said performance characteristics.  
   
   
       19 . The method of  claim 18 , wherein said control charts define an out of control situation for each of said plurality of process tools.  
   
   
       20 . The method of  claim 18 , wherein said control operation on the basis of said statistical process control mechanism is performed on the basis of a sampling time that is less or equal to a time interval of a shift change in a production facility accommodating said manufacturing process line.  
   
   
       21 . The method of  claim 12 , further comprising comparing said performance characteristics determined for a specified tool configuration with respective reference data.  
   
   
       22 . The method of  claim 21 , wherein said reference data are obtained from a dynamic model for each of said plurality of process tools.  
   
   
       23 . The method of  claim 21 , wherein said reference data are obtained from previously determined performance characteristics.  
   
   
       24 . The method of  claim 21 , wherein said reference data are obtained from previously determined performance characteristics.  
   
   
       25 . The method of  claim 21 , further comprising identifying a process tool of significance on the basis of said performance characteristics and a result of said comparison.  
   
   
       26 . The method of  claim 22 , wherein said dynamic model is a discrete event model of said process tools for said specified tool configuration, said model representing an ideal tool behavior for said specified tool configuration.