Silver alloy sputtering target for forming reflective layer of optical recording media

Abstract

A silver alloy sputtering target for forming Ag alloy reflective layer of optical recording media such as magneto-optical recording disks (MD, MO) and optical recording disks (CD-RW, DVD-RAM) is provided. The sputtering target is made of (1) a silver alloy having a composition of 0.5 to 3% by mass of Cu and 0.1 to 3% by mass in total of one or more elements selected from among Dy, La, Nd, Tb and Gd, with the remainder consisting of Ag; (2) a silver alloy having a composition of 0.5 to 3% by mass of Cu and 0.005 to 0.05% by mass in total of one or more elements selected from among Ca, Be and Si, with the remainder consisting of Ag; or (3) a silver alloy having composition of 0.5 to 3% by mass of Cu, 0.1 to 3% by mass in total of one or more elements selected from among Dy, La, Nd, Tb and Gd and 0.005 to 0.05% by mass in total of one or more elements selected from among Ca, Be and Si, with the remainder consisting of Ag.

1 . A silver alloy sputtering target for forming a reflective layer of optical recording media comprising: 
 a silver alloy having    0.5 to 3% by mass of Cu;    0.1 to 3% by mass in total of one or more elements selected from among Dy, La, Nd, Tb and Gd; and    the remainder consisting of Ag.    
   
   
       2 . A silver alloy sputtering target for forming a reflective layer of optical recording media comprising: 
 a silver alloy having    0.5 to 3% by mass of Cu;    0.005 to 0.05% by mass in total of one or more elements selected from among Ca, Be and Si; and    the remainder consisting of Ag.    
   
   
       3 . A silver alloy sputtering target for forming a reflective layer of optical recording media comprising: 
 a silver alloy having    0.5 to 3% by mass of Cu;    0.1 to 3% by mass in total of one or more elements selected from among Dy, La, Nd, Tb and Gd;    0.005 to 0.05% by mass in total of one or more elements selected from among Ca, Be and Si; and    the remainder consisting of Ag.    
   
   
       4 . A reflective layer of optical recording medium formed by using the silver alloy sputtering target according to  claim 1 .  
   
   
       5 . A reflective layer of optical recording medium formed by using the silver alloy sputtering target according to  claim 2 .  
   
   
       6 . A reflective layer of optical recording medium formed by using the silver alloy sputtering target according to  claim 3.