Addressing method of movable elements in a spatial light modulator (SLM)

Abstract

The present invention relates to a method for modulating at least one pulse of electromagnetic radiation with a spatial light modulator. At least one mechanically movable modulator element is provided. At least one actuating element is provided capable to produce forces on said modulator element. An address signal to said at least one movable element is provided. A first amplifying signal is provided to at least one first electrode belonging to said at least one movable element shaping and timing said amplifying signal for creating a mechanical response in the modulator element representing a desired modulation state for said electromagnetic radiation pulse when impinging onto said modulator element.

1 . A method to reduce charging effects affecting a degree of deflection in at least one tilting micro mirror in a spatial light modulator (SLM), said at least one micro mirror is electrostatically attractable to at least one electrode, including the action of: 
 attracting electrostatically said at least one micro mirrors in a sequence of reversed electrical field between said micro mirror and said at least one electrode.    
   
   
       2 . The method according to  claim 1 , wherein said sequence of reversed electrical field is periodic.  
   
   
       3 . The method according to  claim 1 , further comprising the action of: 
 deflecting said movable micro mirror in a sequence of clockwise and counter-clockwise movement.    
   
   
       4 . The method according to  claim 3 , wherein said sequence of clockwise and counter-clockwise movement is periodic.  
   
   
       5 . The method according to  claim 1 , wherein said micro mirrors are operated in an analog mode.