Apparatus and method for recovery of a system for disc-shaped objects

Abstract

An apparatus for recovery in the system for processing disc-shaped objects is disclosed. The system is provided with an OHT that places and/or removes at least one FOUP containing disc-shaped objects onto and/or off of a loadport. A light barrier arrangement is attached in front of a region of the loadport, which is designed for placing and/or removing a FOUP by means of the OHT. An input device is provided through which the OHT resumes the process of placing and/or removing the FOUP when this is stopped by an interruption of the light barrier arrangement.

1 . Apparatus for recovery in a system for processing disc-shaped objects, whereby an OHT is provided for the system, which places and/or removes a FOUP with disc-shaped objects on and/or from a loadport, wherein a light barrier arrangement is attached in front of a region of the loadport that is implemented for placing and/or removing a FOUP by the OHT, and wherein an input device is provided by which the OHT can be reset when the placing and/or removing is stopped by interruption of the light barrier arrangement.  
   
   
       2 . Apparatus according to  claim 1 , wherein the light barrier arrangement comprises a linear arrangement of several individual light barriers, whereby each comprises a light source and a receiver.  
   
   
       3 . Apparatus according to  claim 2 , wherein a first and a second wall are attached above the loadport, between which the input opening for the system is implemented, and wherein the linear arrangement of a light barrier is provided at the end of the first and the second wall that faces away from the system.  
   
   
       4 . Apparatus according to  claim 1 , wherein the input device is a visual display screen that is connected to the system and the OHT by a control mechanism.  
   
   
       5 . Apparatus according to  claim 4 , wherein the visual display screen is a touchscreen.  
   
   
       6 . Apparatus according to  claim 1 , wherein the system is connected with a signal tower that comprises several lights.  
   
   
       7 . Apparatus according to  claim 1 , wherein the disc-shaped object is a wafer, or a wafer on a glass substrate, or a mask for lithography, or a flat-panel display.  
   
   
       8 . Method for recovery in a system for processing disc-shaped objects, characterized by the following steps: 
 interruption of the light barrier arrangement during placing or removing a FOUP on and/or from a loadport;    monitoring whether interruption of the light barrier arrangement is ongoing; and    recovery and continuation of placing of the FOUP or removing of the FOUP on and/or from the loadport.    
   
   
       9 . Method according to  claim 8 , wherein automatic recovery is selected by the operator from the visual display screen.  
   
   
       10 . Method according to  claim 9 , wherein the alarm caused by the light barrier is reset as a result of automatic recovery; wherein an ES signal is given to resume the process; and wherein the E84 load/unload sequence is concluded.  
   
   
       11 . Method according to  claim 8 , wherein manual recovery is selected by the operator, whereby the OHT is manually reset and a manual reset is confirmed on the visual display screen.  
   
   
       12 . Method according to  claim 11 , wherein the alarm caused by the light barrier is reset, and wherein the E84 load/unload sequence is restarted.  
   
   
       13 . Method according to  claim 8 , wherein a service technician must be called if the interruption of the light barrier arrangement cannot be eliminated.  
   
   
       14 . Method according to  claim 8 , wherein the disc-shaped object is a wafer, or a wafer on a glass substrate, or a mask for lithography, or a flat-panel display.