US2006180945A1PendingUtilityA1
Forming a cap above a metal layer
Est. expiryNov 20, 2022(expired)· nominal 20-yr term from priority
H10W 72/952H10W 72/934H10W 72/932H10W 72/923H10W 72/536H10W 72/59H10W 70/60H10W 72/019H10W 20/40
43
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Claims
Abstract
In one embodiment, the present invention includes an apparatus having a metal layer with a pad disposed above a substrate; and a cap disposed above the metal layer having a first portion to provide for contact with a probe and a second portion to provide a bonding surface, and the cap is electrically coupled to the pad.
Claims
exact text as granted — not AI-modified1 . An apparatus comprising:
a metal layer disposed above a substrate, the metal layer having at least one pad; and a cap layer disposed above the metal layer, the cap layer having a first portion to provide for contact with a probe and a second portion to provide a bonding surface, the cap layer electrically coupled to the at least one pad.
2 . The apparatus of claim 1 , further comprising a passivation layer disposed between the metal layer and the cap layer.
3 . The apparatus of claim 2 , further comprising an opening in the passivation layer so that a portion of the cap layer contacts the at least one pad.
4 . The apparatus of claim 1 , wherein the first portion and the second portion are laterally removed from the at least one pad.
5 . The apparatus of claim 1 , wherein the cap layer comprises titanium aluminum.
6 . The apparatus of claim 2 wherein the metal layer comprises a terminal metal layer.
7 . The apparatus of claim 6 , wherein the terminal metal layer comprises a plurality of subpads.
8 . The apparatus of claim 7 , wherein the plurality of subpads comprises a first subpad coupled to a first circuit and a second subpad coupled to a second circuit.
9 . The apparatus of claim 8 , wherein the cap layer is electrically coupled to the first subpad and the second subpad so that a test probe coupled to the first portion of the cap layer can selectively test the first circuit or the second circuit.
10 . An apparatus comprising:
a metal layer disposed above a substrate, the metal layer having a first area comprising a pad; and a cap layer disposed above the metal layer and having a portion in contact with a portion of the metal layer, the cap layer having a second area comprising a contact surface, the second area laterally displaced from the first area.
11 . The apparatus of claim 10 , further comprising a passivation layer disposed between the metal layer and the cap layer.
12 . The apparatus of claim 11 , further comprising an opening in the passivation layer so that the portion of the cap layer contacts the portion of the metal layer.
13 . The apparatus of claim 10 , wherein the second area is substantially larger than the first area.
14 . The apparatus of claim 10 , further comprising at least one lead coupled to the contact surface.
15 . An apparatus comprising:
a metal layer disposed above a substrate, the metal layer having at least one pad; and a cap disposed above the metal layer, the cap having a probe pad and bond pad, the probe pad and the bond pad laterally displaced from the at least one pad, the cap electrically coupled to the at least one pad.
16 . The apparatus of claim 15 , further comprising a passivation layer disposed between the metal layer and the cap.
17 . The apparatus of claim 15 , further comprising a passivation layer disposed above the cap.
18 . The apparatus of claim 15 , wherein the cap comprises titanium aluminum.
19 . The apparatus of claim 15 , wherein the probe pad is located at an interior portion of a semiconductor die and the bond pad is located at a peripheral portion of the semiconductor die.
20 . The apparatus of claim 15 , further comprising a lead coupled to the probe pad.Join the waitlist — get patent alerts
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