Three-dimensional micro spike and method of manufacturing the same

Abstract

A micro spike having a three-dimensional structure made of single crystalline silicon and being capable of picking an enough amount of a tissue to examine the tissue while minimizing an examinee's pain with a minimal invasion when picking the tissue and a method of manufacturing the same are disclosed. The micro spike comprising: a main body part; extension parts inserted into a tissue when picking the tissue sample and integratedly extended from upper and lower parts of one side of the main body part; and a protrusion part integratedly protruded from at least one of side surfaces of the extension parts and inserted into the tissue to pick the tissue sample together with the extension parts when picking the living tissue sample.

1 . A micro spike comprising: 
 a main body part capable of being insertion-mounted to a medical device for picking a living tissue sample;    extension parts inserted into a tissue when picking the tissue sample and integratedly extended from upper and lower parts of one side of the main body part; and    a protrusion part integratedly protruded from at least one of side surfaces of the extension parts and inserted into the tissue to pick the tissue sample together with the extension parts when picking the living tissue sample.    
   
   
       2 . The micro spike according to  claim 1 , wherein one or more protrusion parts are respectively formed on opposing side surfaces between the extension parts.  
   
   
       3 . The micro spike according to  claim 1 , wherein a shape of the protrusion part is a wing shape, a semicircular shape, a rectangular shape or a triangular shape.  
   
   
       4 . The micro spike according to  claim 1 , wherein the protrusion part has a width (W) between 5 μm and 5 mm, a space (D) between 5 μm and 5 mm, and a height (H) between 5 μm and 5 mm.  
   
   
       5 . The micro spike according to  claim 1 , wherein a surface of the micro spike is coated with any one of parylene, polymer film, a silicon oxide film, a silicon nitride film, gold and aluminum.  
   
   
       6 . The micro spike according to  claim 1 , wherein the number of the extension part respectively formed at the upper and lower parts of the one side of the main body is between 1 and 10.  
   
   
       7 . A method of manufacturing a three-dimensional micro spike comprising steps of: 
 forming an insulation film consisting of a stacked structure of silicon oxide film and silicon nitride film on both surfaces of a single crystalline silicon substrate, performing a photographing process on the insulation film, and thus forming a pattern of the insulation film, so as to define a shape of a micro spike;    performing a first reactive ion etching process for both the surfaces of the single crystalline silicon substrate and thus etching the silicon substrate by a thickness of a extension part, so as to determine the thickness of the extension part;    vapor-depositing a passivation film on each side surface of the part etched through the reactive ion etching process;    performing a second reactive ion etching process for a region except the deposition part of the passivation film so as to define a sacrificial layer;    performing an anisotropic wet etching for the silicon substrate etched through the second reactive ion etching process using a basic solution; and    performing a dicing process so as to separate the micro spike from the wet-etched silicon substrate.    
   
   
       8 . The method according to  claim 7 , wherein the passivation film comprises any one of parylene, a silicon oxide film, a silicon nitride film, gold and aluminum.  
   
   
       9 . The method according to  claim 7 , further comprising a step of coating a surface of the micro spike separated in the dicing process with any one of parylene, polymer film, a silicon oxide film, a silicon nitride film, gold and aluminum.  
   
   
       10 . The micro spike according to  claim 1 , wherein the micro spike is capable of being connected or separated to or from the medical device by inserting the main body part into a recess formed in the medical device or extracting the main body part from the recess after the insertion.  
   
   
       11 . The micro spike according to  claim 2 , wherein the micro spike is capable of being connected or separated to or from the medical device by inserting the main body part into a recess formed in the medical device or extracting the main body part from the recess after the insertion.  
   
   
       12 . The micro spike according to  claim 3 , wherein the micro spike is capable of being connected or separated to or from the medical device by inserting the main body part into a recess formed in the medical device or extracting the main body part from the recess after the insertion.  
   
   
       13 . The micro spike according to  claim 4 , wherein the micro spike is capable of being connected or separated to or from the medical device by inserting the main body part into a recess formed in the medical device or extracting the main body part from the recess after the insertion.  
   
   
       14 . The micro spike according to  claim 5 , wherein the micro spike is capable of being connected or separated to or from the medical device by inserting the main body part into a recess formed in the medical device or extracting the main body part from the recess after the insertion.  
   
   
       15 . The micro spike according to  claim 6 , wherein the micro spike is capable of being connected or separated to or from the medical device by inserting the main body part into a recess formed in the medical device or extracting the main body part from the recess after the insertion.