Imprint lithography template to facilitate control of liquid movement

Abstract

The present invention is directed to a template that features a control surface extending from a periphery of a mold toward a recessed surface of the template forming an oblique angle between a portion of the control surface disposed proximate to the periphery.

1 . A template comprising: 
 a mold having a periphery lying in a plane;    a recessed surface spaced-apart from said plane; and    a control surface extending from said periphery toward said recessed surface, with an oblique angle being defined between a portion of said control surface disposed proximate to said periphery and said plane.    
     
     
         2 . The template as recited in  claim 1  further including a sidewall with said control surface extending between said sidewall and said periphery and said sidewall extending between said control surface and said recessed surface.  
     
     
         3 . The template as recited in  claim 1  wherein said control surface substantially surrounds said mold.  
     
     
         4 . The template as recited in  claim 1  wherein said control surface terminates at said recessed surface.  
     
     
         5 . The template as recited in  claim 1  wherein said control surface has an arcuate shape.  
     
     
         6 . The template as recited in  claim 1  wherein said control surface has a linear shape.  
     
     
         7 . The template as recited in  claim 1  wherein said control surface has a concave shape.  
     
     
         8 . The template as recited in  claim 1  wherein said control surface has a convex shape.  
     
     
         9 . The template as recited in  claim 1  further comprising a mesa wall surface positioned between said recessed surface and said control surface, with said sidewall surface extending orthogonally to said recessed surface.  
     
     
         10 . The template as recited in  claim 1  further wherein said mold has a surface energy associated therewith that is greater than a surface energy of said control surface.  
     
     
         11 . A template comprising: 
 a mold having a periphery lying in a plane;    a recessed surface spaced-apart from said plane;    a sidewall surface; and    a control surface extending between said periphery and said sidewall surface, with an oblique angle being defined between a portion of said control surface disposed proximate to said periphery and said plane, said sidewall surface extending between said control surface and said recessed surface, with said recessed surface extending orthogonally to said sidewall surface.    
     
     
         12 . The template as recited in  claim 10  wherein said control surface substantially surrounds said mold.  
     
     
         13 . The template as recited in  claim 10  wherein said control surface terminates at said recessed surface.  
     
     
         14 . The template as recited in  claim 10  wherein said control surface has an arcuate shape.  
     
     
         15 . The template as recited in  claim 10  wherein said control surface has a linear shape.  
     
     
         16 . The template as recited in  claim 10  wherein said control surface has a concave shape.  
     
     
         17 . The template as recited in  claim 10  wherein said control surface has a convex shape.  
     
     
         18 . A template comprising: 
 a mold having a periphery lying in a plane;    a recessed surface spaced-apart from said plane; and    a control surface extending from said periphery toward said recessed surface, with an oblique angle being defined between a portion of said control surface disposed proximate to said periphery and said plane, with said mold has a surface energy associated therewith that is greater than a surface energy of said control surface.    
     
     
         19 . The template as recited in  claim 18  wherein said control surface has a shape associated therewith selected from a set of shapes consisting essentially of a linear shape, a concave shape and a convex shape.  
     
     
         20 . The template as recited in  claim 18  further including a sidewall with said control surface extending between said sidewall and said periphery and said sidewall extending between said control surface and said recessed surface, with said sidewall and said recessed surfaces each having a surface energy associated therewith that is less than a surface energy of said mold.