Low-current pogo probe card

Abstract

A low-current pogo probe card for measuring currents down to the femtoamp region includes a laminate board having a layer of conductive traces interposed between two dielectric layers. A plurality of probing devices, such as ceramic blades, are edge-mounted about a central opening so that the probing needles or needles included therein terminate below the opening in a pattern suitable for probing a test subject workpiece. A plurality of pogo pin receiving pad sets, each including a guard pad, occupy the periphery of the board. Each guard pad is electrically connected to a trace from the layer of conductive traces. The pad sets may be connected to the probing devices by low noise cables or traces. Air trenches separate the pad sets for reducing cross talk and signal settling times.

1 - 8 . (canceled)  
   
   
       9 . A probing device for probing a probing site on a test device, comprising: 
 a dielectric substrate having first and second sides, an elongate conductive path on said first side and a replaceable elongate probing needle connected to one end of said elongate conductive path so as to extend in a cantilevered manner beyond said substrate.    
   
   
       10 . The probing device of  claim 9  including an adjustment mechanism for adjusting the position of said probing terminus of said probing needle relative to the position of the dielectric substrate.  
   
   
       11 . The probing device of  claim 10  wherein said adjustment mechanism is a set of set screws.  
   
   
       12 - 14 . (canceled)