Electrolytic process using anion permeable barrier

Abstract

Processes and systems for electrolytically processing a microfeature workpiece with a first processing fluid and an anode are described. Microfeature workpieces are electrolytically processed using a first processing fluid, an anode, a second processing fluid, and an anion permeable barrier layer. The anion permeable barrier layer separates the first processing fluid from the second processing fluid while allowing certain anionic species to transfer between the two fluids. The described processes produce deposits over repeated plating cycles that exhibit resistivity values within desired ranges.

1 . A process for electrolytically processing a microfeature workpiece as the working electrode with a first processing fluid and a counter electrode comprising: 
 contacting a surface of the microfeature workpiece with the first processing fluid, the first processing fluid comprising first processing fluid species including a cation, an anion, and a complexing agent;    contacting the counter electrode with a second processing fluid;    producing an electrochemical reaction at the counter electrode; and    substantially preventing movement of cationic species between the first processing fluid and the second processing fluid species.    
     
     
         2 - 53 . (canceled)