Vapor deposition apparatus

Abstract

A vapor deposition apparatus, developed in particular for on-line deposition of phosphor or scintillator material, wherein said vapor deposition apparatus comprises a crucible containing a mixture of raw materials, a chimney having at least one inlet in communication with the said crucible and a linear slot outlet, one or more lineair heating elements, contained within said chimney, an oven surrounding said crucible, wherein said oven contains heating elements, shielding elements and cooling elements.

1 . A vapor deposition apparatus comprising 
 a) a crucible containing a mixture of raw materials;    b) a chimney having at least one inlet in communication with said crucible and a linear slot outlet, having a width W and a length L;    c) more than one linear heating elements, contained within said chimney wherein said heating element is a baffle;    d) an oven surrounding the crucible, containing heating elements, shielding elements and cooling elements.    
   
   
       2 . Vapor deposition apparatus according to  claim 1 , wherein longitudinal parts of said crucible and chimney form one integrated part and are made out of one piece of material in order to prevent material losses at the interface thereof.  
   
   
       3 . Vapor deposition apparatus according to  claim 1 , wherein more than one linear heating element is mounted in said chimney.  
   
   
       4 . Vapor deposition apparatus according to  claim 2 , wherein more than one linear heating element is mounted in said chimney.  
   
   
       5 . Vapor deposition apparatus according to  claim 1 , wherein three linear chimney heating elements are mounted versus said slot outlet and positioned so that there is no direct path for vaporized particles from said raw materials to escape through said slot outlet.  
   
   
       6 . Vapor deposition apparatus according to  claim 2 , wherein three linear chimney heating elements are mounted versus said slot outlet and positioned so that there is no direct path for vaporized particles from said raw materials to escape through said slot outlet.  
   
   
       7 . Vapor deposition apparatus according to  claim 3 , wherein three linear chimney heating elements are mounted versus said slot outlet and positioned so that there is no direct path for vaporized particles from said raw materials to escape through said slot outlet.  
   
   
       8 . Vapor deposition apparatus according to  claim 4 , wherein three linear chimney heating elements are mounted versus said slot outlet and positioned so that there is no direct path for vaporized particles from said raw materials to escape through said slot outlet.  
   
   
       9 . Vapor deposition apparatus according to  claim 5 , wherein said slot outlet is a rectangular slot outlet.  
   
   
       10 . Vapor deposition apparatus according to  claim 6 , wherein said slot outlet is a rectangular slot outlet.  
   
   
       11 . Vapor deposition apparatus according to  claim 7 , wherein said slot outlet is a rectangular slot outlet.  
   
   
       12 . Vapor deposition apparatus according to  claim 8 , wherein said slot outlet is a rectangular slot outlet.  
   
   
       13 . Vapor deposition apparatus according to  claim 1 , wherein said linear chimney heating elements are movable in an upward or downward position.  
   
   
       14 . Vapor deposition apparatus according to  claim 1 , further comprising a heat shield around said chimney.  
   
   
       15 . Vapor deposition apparatus according to  claim 1 , further comprising regulation means for said width W of said slot outlet of said chimney along its length L.  
   
   
       16 . Vapor deposition apparatus according to  claim 1 , wherein said chimney slot outlet has an average width W 1 , said chimney inlet has an average width W 2 , and wherein a ratio of W 2 /W 1  is more than 3.  
   
   
       17 . Vapor deposition apparatus according to  claim 1 , wherein said chimney slot outlet has an average width W 1 , said chimney inlet has an average width W 2 , and wherein a ratio of W 2 /W 1  is more than 4.  
   
   
       18 . Vapor deposition apparatus according to  claim 1 , wherein said chimney slot outlet has an average width W 1 , said chimney inlet has an average width W 2 , and wherein a ratio of W 2 /W 1  is more than 8.  
   
   
       19 . Vapor deposition apparatus according to  claim 1 , further having at least two cylindrical carrier rollers within a sealed zone, wherein each of said carrier rollers have an axis in a parallel arrangement with one another.  
   
   
       20 . Vapor deposition apparatus according to  claim 19 , wherein said zone further comprises more than one crucible containing a mixture of raw materials.  
   
   
       21 - 28 . (canceled)  
   
   
       29 . Vapor deposition apparatus according to  claim 19 , wherein said apparatus further comprises regulable heaters and an addressable cooling unit installed along said cylindrical carrier rollers.  
   
   
       30 - 32 . (canceled)  
   
   
       33 . Vapor deposition apparatus according to  claim 1 , wherein said raw materials comprise phosphor or scintillator precusors.  
   
   
       34 . Vapor deposition apparatus according to  claim 33 , wherein said raw materials comprise as phosphor precusors at least one of the formula Cs x Eu y X′ x+αy , wherein the ratio of x to y exceeds a value of 0.25, wherein α≧2 and wherein X′ is a halide selected from the group consisting of Cl, Br and I and combinations thereof.  
   
   
       35 . Vapor deposition apparatus according to  claim 33 , wherein said raw materials comprise as phosphor precusors, CsBr as a raw material and at least one phosphor precursor of the formula Cs x Eu y X′ x+αy , wherein the ratio of x to y exceeds a value of 0.25, wherein α≧2 and wherein X′ is a halide selected from the group consisting of Cl, Br and I and combinations thereof.  
   
   
       36 . Vapor deposition apparatus according to  claim 1  wherein said heating element is a quartz lamp.