System and method of planar positioning

Abstract

A system and method of controlling the relationship between two surfaces (such as a primary surface and a reference surface) and correcting any deviation from the desired or ideal relationship generally employ a plurality of actuators and flexural assemblies. The actuators may be driven in unison to translate the primary surface in one-dimension; the actuators may also be driven independently, accommodating fine adjustment in pitch, roll, or both, of the primary surface. Flexural assemblies may be implemented to minimize lateral cross-coupling between the linear actuators.

1 - 17 . (canceled)  
   
   
       18 . A method of controlling the relationship between surfaces in a probe card analysis system; said method comprising: 
 defining a reference surface a primary surface    coupling said reference surface to a primary surface by a plurality of actuators; and,    controlling the relationship between said primary surface and said reference surface; wherein controlling comprises driving selected ones of said plurality of actuators, and receiving feedback from at least three of said plurality of actuators.    
   
   
       19 . The method of  claim 18  wherein said driving includes driving each of said plurality of actuators in unison to obtain linear motion.  
   
   
       20 . The method of  claim 18  wherein said driving includes driving at least one of said plurality of actuators independently to control pitch and roll.  
   
   
       21 . A system comprising: 
 a platform having a primary surface attached thereto;    a frame, and    a plurality of actuators attaching said platform to said frame, said plurality of actuators operable to provide feedback from at least three of said plurality of actuators.    
   
   
       22 . A metrology system comprising: 
 a metrology frame having one or more vertically-aligned structural members;    a plurality of linear actuators attached to said vertically-aligned structural members; and    a platform supporting a primary surface and coupled to each of said plurality of linear actuators; wherein    said plurality of linear actuators is operative to stabilize the primary surface relative to a reference surface.    
   
   
       23 . The metrology system of  claim 22  and further comprising a respective flexural assembly attached to each of said plurality of linear actuators and coupling a respective linear actuator to said platform.  
   
   
       24 . The metrology system of  claim 23  wherein each respective flexural assembly is operative to minimize lateral cross-coupling between said plurality of linear actuators.