Systems and methods for electrochemically processing microfeature workpieces

Abstract

Systems and methods for electrochemically processing microfeature workpieces are disclosed herein. In one embodiment, a method includes flowing a first processing fluid at least proximate to a processing site in a reaction chamber, flowing a second processing fluid at least proximate to an electrode in the reaction chamber, applying an electrical current to the electrode to establish an electrical current flow in the first and second processing fluids, separating the first processing fluid and the second processing fluid with a barrier, and changing a batch of the first and/or second processing fluid after at least five weeks of normal operation.

1 . A method of electrochemically processing microfeature workpieces, the method comprising: 
 flowing a first processing fluid at least proximate to a processing site in a reaction chamber;    flowing a second processing fluid at least proximate to an electrode in the reaction chamber;    applying an electrical current to the electrode to establish an electrical current flow in the first and second processing fluids;    separating the first processing fluid and the second processing fluid with a barrier; and    changing a batch of the first and/or second processing fluid after at least five weeks of normal operation.    
   
   
       2 . The method of  claim 1  wherein changing the batch of the first and/or second processing fluid comprises replacing the batch of the first and/or second processing fluid after at least two months of normal operation.  
   
   
       3 . The method of  claim 1  wherein changing the batch of the first and/or second processing fluid comprises replacing the batch of the first and/or second processing fluid after at least three months of normal operation.  
   
   
       4 . The method of  claim 1  wherein changing the batch of the first and/or second processing fluid comprises replacing the batch of the first and/or second processing fluid after at least six months of normal operation.  
   
   
       5 . The method of  claim 1  wherein changing the batch of the first and/or second processing fluid comprises replacing the batch of the first and/or second processing fluid after at least one year of normal operation.  
   
   
       6 . The method of  claim 1  wherein changing the batch of the first and/or second processing fluid comprises replacing the batch of the first processing fluid after at least five weeks of normal operation.  
   
   
       7 . The method of  claim 1  wherein separating the first and second processing fluids comprises inhibiting organic additives from passing between the first and second processing fluids with a porous barrier.  
   
   
       8 . The method of  claim 1  wherein separating the first and second processing fluids comprises separating the flow of the first processing fluid from the flow of the second processing fluid with a semipermeable barrier.  
   
   
       9 . The method of  claim 1  wherein separating the first and second processing fluids comprises separating the flows of the first and second processing fluids with a nonporous barrier configured to allow either cations or anions to pass through the barrier between the first and second processing fluids.  
   
   
       10 . The method of  claim 1  wherein: 
 flowing the first processing fluid comprises flowing a catholyte having a concentration of between approximately 10 g/l and approximately 200 g/l of acid; and    flowing the second processing fluid comprises flowing an anolyte having a concentration of between approximately 0.1 g/l and approximately 1.0 g/l of acid.    
   
   
       11 . The method of  claim 1  wherein: 
 flowing the first processing fluid comprises flowing a catholyte having a first concentration of acid; and    flowing the second processing fluid comprises flowing an anolyte having a second concentration of acid, the ratio of the first concentration of acid to the second concentration of acid being between approximately 10:1 and approximately 20,000:1.    
   
   
       12 . The method of  claim 1  wherein: 
 flowing the second processing fluid comprises flowing the second processing fluid at least proximate to a plurality of electrodes in the reaction chamber; and    applying the electrical current comprises applying electrical potentials to individual electrodes to establish the electrical current flow in the first and second processing fluids.    
   
   
       13 . A method of operating a system for depositing material onto microfeature workpieces, the method comprising: 
 processing a plurality of microfeature workpieces in an electrochemical deposition chamber, the deposition chamber comprising (a) a processing unit including a first flow system configured to convey a flow of a first processing fluid to the microfeature workpieces, (b) an electrode unit coupled to the processing unit, the electrode unit including a plurality of electrode compartments, a plurality of electrodes in corresponding compartments, and a second flow system configured to convey a flow of a second processing fluid proximate to the electrodes, and (c) a barrier between the processing unit and the electrode unit to inhibit selected matter from passing between the first and second processing fluids; and    replacing a batch of the first and/or second processing fluid after not less than six weeks of processing.    
   
   
       14 . The method of  claim 13  wherein replacing the batch of the first and/or second processing fluid comprises changing the batch of the first and/or second processing fluid after not less than two months of processing.  
   
   
       15 . The method of  claim 13  wherein replacing the batch of the first and/or second processing fluid comprises changing the batch of the first and/or second processing fluid after not less than three months of processing.  
   
   
       16 . The method of  claim 13  wherein replacing the batch of the first and/or second processing fluid comprises changing the batch of the first and/or second processing fluid after not less than six months of processing.  
   
   
       17 . The method of  claim 13  wherein replacing the batch of the first and/or second processing fluid comprises changing the batch of the first and/or second processing fluid after not less than one year of processing.  
   
   
       18 . The method of  claim 13  wherein the barrier comprises a porous barrier.  
   
   
       19 . The method of  claim 13  wherein the barrier comprises a semipermeable barrier.  
   
   
       20 . A method of electrochemically processing microfeature workpieces, the method comprising: 
 flowing a first processing fluid at least proximate to a microfeature workpiece in a reaction chamber;    flowing a second processing fluid at least proximate to an electrode in the reaction chamber;    selectively applying an electrical current to the electrode to establish an electrical current flow in the first and second processing fluids;    separating the first processing fluid and the second processing fluid with a barrier; and    removing and replenishing the first and/or second processing fluid at a rate of less than five percent of the corresponding fluid volume per day.    
   
   
       21 . The method of  claim 20  wherein removing and replenishing the first and/or second processing fluid comprises bleeding and feeding the first and/or second processing fluid at a rate of three percent or less of the corresponding fluid volume per day.  
   
   
       22 . The method of  claim 20  wherein removing and replenishing the first and/or second processing fluid comprises bleeding and feeding ten liters or less of the first and/or second processing fluid per day.  
   
   
       23 . The method of  claim 20  wherein removing and replenishing the first and/or second processing fluid comprises bleeding and feeding five liters or less of the first and/or second processing fluid per day.  
   
   
       24 . The method of  claim 20  wherein removing and replenishing the first and/or second processing fluid comprises bleeding and feeding one liter or less of the first and/or second processing fluid per day.  
   
   
       25 . The method of  claim 20  wherein removing and replenishing the first and/or second processing fluid comprises analyzing the removed first and/or second processing fluid.  
   
   
       26 . The method of  claim 20  wherein separating the first and second processing fluids comprises inhibiting organic additives from passing between the first and second processing fluids with a porous barrier.  
   
   
       27 . The method of  claim 20  wherein separating the first and second processing fluids comprises separating the flow of the first processing fluid from the flow of the second processing fluid with a semipermeable barrier.  
   
   
       28 . The method of  claim 20  wherein separating the first and second processing fluids comprises separating the flows of the first and second processing fluids with a nonporous barrier configured to allow either cations or anions to pass through the barrier between the first and second processing fluids.  
   
   
       29 . The method of  claim 20  wherein: 
 flowing the first processing fluid comprises flowing a catholyte having a concentration of between approximately 10 g/l and approximately 200 g/l of acid; and    flowing the second processing fluid comprises flowing an anolyte having a concentration of between approximately 0.1 g/l and approximately 1.0 g/l of acid.    
   
   
       30 . The method of  claim 20  wherein: 
 flowing the first processing fluid comprises flowing a catholyte having a first concentration of acid; and    flowing the second processing fluid comprises flowing an anolyte having a second concentration of acid, the ratio of the first concentration of acid to the second concentration of acid being between approximately 10:1 and approximately 20,000:1.    
   
   
       31 . The method of  claim 20  wherein: 
 flowing the second processing fluid comprises flowing the second processing fluid at least proximate to a plurality of electrodes in the reaction chamber; and    selectively applying the electrical current comprises applying electrical potentials to individual electrodes to establish the electrical current flow in the first and second processing fluids.    
   
   
       32 . A method of operating a system for depositing material onto microfeature workpieces, the method comprising: 
 processing a plurality of microfeature workpieces in an electrochemical deposition chamber, the deposition chamber comprising (a) a processing unit including a first flow system configured to convey a flow of a first processing fluid to the microfeature workpieces, (b) an electrode unit coupled to the processing unit, the electrode unit including a plurality of electrode compartments, a plurality of electrodes in corresponding compartments, and a second flow system configured to convey a flow of a second processing fluid proximate to the electrodes, and (c) a barrier between the processing unit and the electrode unit to inhibit selected matter from passing between the first and second processing fluids; and    removing and replenishing four percent or less of the first and/or second processing fluid per day during processing.    
   
   
       33 . The method of  claim 32  wherein removing and replenishing the first and/or second processing fluid comprises bleeding and feeding three percent or less of the first and/or second processing fluid per day.  
   
   
       34 . The method of  claim 32  wherein removing and replenishing the first and/or second processing fluid comprises bleeding and feeding ten liters or less of the first and/or second processing fluid per day.  
   
   
       35 . The method of  claim 32  wherein removing and replenishing the first and/or second processing fluid comprises bleeding and feeding five liters or less of the first and/or second processing fluid per day.  
   
   
       36 . The method of  claim 32  wherein removing and replenishing the first and/or second processing fluid comprises bleeding and feeding one liter or less of the first and/or second processing fluid per day.  
   
   
       37 . The method of  claim 32  wherein the barrier comprises a porous barrier.  
   
   
       38 . The method of  claim 32  wherein the barrier comprises a semipermeable barrier.  
   
   
       39 . A system for wet chemical processing of microfeature workpieces, the system comprising: 
 a processing unit including a first flow system for conveying a flow of a first processing fluid to a microfeature workpiece;    an electrode unit coupled to the processing unit, the electrode unit including an electrode and a second flow system for conveying a flow of a second processing fluid proximate to the electrode;    a barrier between the processing unit and the electrode unit to inhibit selected matter from passing between the first and second processing fluids; and    a controller operably coupled to the processing and/or electrode unit, the controller having a computer-readable medium containing instructions to perform a method comprising—
 flowing the first processing fluid at least proximate to the microfeature workpiece;  
 flowing the second processing fluid at least proximate to the electrode;  
 applying an electrical current to the electrode to establish an electrical current flow in the first and second processing fluids; and  
 changing a batch of the first and/or second processing fluid after at least five weeks of normal operation.  
   
   
   
       40 . The system of  claim 39  wherein the computer-readable medium instruction changing the batch of the first and/or second processing fluid comprises replacing the batch of the first and/or second processing fluid after at least two months of normal operation.  
   
   
       41 . The system of  claim 39  wherein the computer-readable medium instruction changing the batch of the first and/or second processing fluid comprises replacing the batch of the first and/or second processing fluid after at least three months of normal operation.  
   
   
       42 . The system of  claim 39  wherein the computer-readable medium instruction changing the batch of the first and/or second processing fluid comprises replacing the batch of the first and/or second processing fluid after at least six months of normal operation.  
   
   
       43 . The system of  claim 39  wherein the computer-readable medium instruction changing the batch of the first and/or second processing fluid comprises replacing the batch of the first and/or second processing fluid after at least one year of normal operation.  
   
   
       44 . The system of  claim 39  wherein the barrier comprises a semipermeable barrier that allows either cations or anions to pass through the barrier between the first and second processing fluids.  
   
   
       45 . A system for wet chemical processing of microfeature workpieces, the system comprising: 
 a processing unit including a first flow system for conveying a flow of a first processing fluid to a microfeature workpiece;    an electrode unit coupled to the processing unit, the electrode unit including a plurality of electrode compartments, a plurality of electrodes in corresponding compartments, and a second flow system for conveying a flow of a second processing fluid proximate to the electrodes;    a barrier between the processing unit and the electrode unit to separate the first and second processing fluids; and    a controller operably coupled to the processing and/or electrode unit, the controller having a computer-readable medium containing instructions to perform a method comprising—
 processing a plurality of microfeature workpieces in the processing unit; and  
 replacing a batch of the first and/or second processing fluid after not less than six weeks of processing.  
   
   
   
       46 . A system for wet chemical processing of microfeature workpieces, the system comprising: 
 a processing unit including a first flow system for conveying a flow of a first processing fluid to a microfeature workpiece;    an electrode unit coupled to the processing unit, the electrode unit including an electrode and a second flow system for conveying a flow of a second processing fluid proximate to the electrode;    a barrier between the processing unit and the electrode unit to inhibit selected matter from passing between the first and second processing fluids; and    a controller operably coupled to the processing and/or electrode unit, the controller having a computer-readable medium containing instructions to perform a method comprising—
 flowing the first processing fluid at least proximate to the microfeature workpiece;  
 flowing the second processing fluid at least proximate to the electrode;  
 selectively applying an electrical current to the electrode to establish an electrical current flow in the first and second processing fluids; and  
 removing and replenishing the first and/or second processing fluid at a rate of less than five percent of the corresponding fluid volume per day.  
   
   
   
       47 . A system for wet chemical processing of microfeature workpieces, the system comprising: 
 a processing unit including a first flow system for conveying a flow of a first processing fluid to a microfeature workpiece;    an electrode unit coupled to the processing unit, the electrode unit including a plurality of electrode compartments, a plurality of electrodes in corresponding compartments, and a second flow system for conveying a flow of a second processing fluid proximate to the electrodes;    a barrier between the processing unit and the electrode unit to separate the first and second processing fluids; and    a controller operably coupled to the processing and/or electrode unit, the controller having a computer-readable medium containing instructions to perform a method comprising—
 processing a plurality of microfeature workpieces in the processing unit; and  
 removing and replenishing four percent or less of the first and/or second processing fluid per day during processing.