Substrate coating unit and substrate coating method

Abstract

The present invention is a coating unit for coating a substrate with a coating solution, comprising a coating solution discharge member for discharging the coating solution to the substrate which is positioned in a downward part. A lower surface of the coating solution discharge member is in a shape having a length longer, at least, than the radius of the substrate and having a narrow width. A coating solution discharge port is disposed in a portion of the coating solution discharge member, facing the center of the substrate, while a solvent mist discharge port for discharging a solvent mist of the coating solution is disposed in a portion facing a peripheral portion including an outer edge potion of the substrate, when the coating solution discharge member is positioned above the radius of the substrate.

1 . A method for coating a substrate with a coating solution, 
 wherein a coating solution discharge member which has a shape with a longer length at least than a radius of the substrate and which includes a coating solution discharge port for discharging the coating solution onto a center of the substrate and a solvent mist discharge port for discharging a solvent mist of the coating solution onto a peripheral portion including an outer edge portion of the substrate is used,    the coating method comprising the steps of:    discharging only the coating solution to the substrate from the coating solution discharge port;    subsequently discharging the solvent mist onto the peripheral portion of the substrate from the solvent mist discharge port in a mid-course of diffusing the coating solution on the substrate by rotating the substrate; and    thereafter, continuously discharging the solvent mist with a discharge amount of the solvent mist being reduced.    
   
   
       2 . A coating method according to  claim 1 , 
 wherein a rotation speed of the substrate is gradually lowered after the discharge amount of the solvent mist is reduced and thereafter, the rotation speed is fixed.    
   
   
       3 . A coating method according to  claim 1 , 
 wherein the coating solution discharge member is moved closer to the substrate when it starts to discharge the solvent mist.