System for inspection of a disk-shaped object

Abstract

A system ( 100, 200, 300 ) for inspecting a disc-shaped object is disclosed. The system ( 100, 200, 300 ) comprises a loading unit for disc-shaped objects 4 and a device 1 for simultaneously imaging the front side and back side of the disc-shaped object 4.

1 . A system for inspecting a disc-shaped object. comprising a loading unit for disc-shaped objects and a device for simultaneously imaging the front side and the back side of the disc-shaped object.  
   
   
       2 . System according to  claim 1 , wherein a device for microinspection of the disc-shaped object is provided in addition to the loading unit and the device for simultaneously imaging the front side and the back side of the disc-shaped object.  
   
   
       3 . System according to  claim 2 , wherein a transport robot is provided in the loading unit, which transports the disc-shaped objects from and to at least one FOUP, from and to the device for simultaneously imaging the front side and back side of the disc-shaped object, and from and to the device for microinspection of the disc-shaped object.  
   
   
       4 . System according to  claim 1 , wherein the device for microinspection of the disc-shaped object comprises a transfer position for the disc-shaped objects from the transport robot to the three-paddle handler, and wherein the three-paddle handler further transports the disc-shaped objects to a pre-aligner and a microinspection element.  
   
   
       5 . System according to  claim 1 , wherein a transport robot is provided in the loading unit, which transports the disc-shaped objects from and to the FOUPs, from and to the device for simultaneously imaging the front side and back side of the disc-shaped object, and a pre-aligner.  
   
   
       6 . System according to  claim 1 , wherein a transport robot is provided in the loading unit, which transports the disc-shaped objects from and to the FOUPs and from and to the device for simultaneously imaging the front side and back side of the disc-shaped object, and wherein the device for simultaneously imaging the front side and the back side of the disc-shaped object comprises an optical alignment.  
   
   
       7 . System according to  claim 1 , wherein the device for simultaneously imaging the front side and back side of the disc-shaped object comprises a detection unit that exhibits a first detector element facing the front side and a second detector element facing the back side of the disc-shaped object, and wherein a relative movement is generated between the detection unit and the disc-shaped object such that in image is made of the front side and the back side of the disc-shaped object.  
   
   
       8 . System according to  claim 7 , wherein the disc-shaped object is a wafer on a semiconductor substrate, or a wafer on a glass substrate, or a mask for lithography, or a flat-panel display.  
   
   
       9 . System according to  claim 1 . where in an edge grip system is provided that fixes the disc-shaped object in-place.  
   
   
       10 . System according to  claim 7 , wherein the first and the second detector element is a linear detector with integrated optic and an integrated light source.  
   
   
       11 . System according to  claim 10 , wherein the first and the second detector element are attached to a movement device that moves the first and the second detector element along the top and bottom of the wafer when the wafer is fixed in place.  
   
   
       12 . System according to  claim 7 , wherein the first and the second detector element comprises a linear detector with integrated optic, and wherein an external light source is provided for the two-dimensional object.  
   
   
       13 . System according to  claim 10 , wherein the first and second detector element are attached to a movement device that moves the first and the second detector element along the top and bottom of the wafer when the wafer is fixed in place.  
   
   
       14 . System according to  claim 7 , wherein the first and the second detector element exhibit a width at least that of the two-dimensional object.  
   
   
       15 . System according to  claim 1 , wherein the device for simultaneously imaging the front side and back side of the disc-shaped object is constructed as a module that can be integrated into the system.  
   
   
       16 . System according to  claim 15 , wherein the module is designed for macroinspection.